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Publication Citation: Study on an Image Stitching Method for Linewidth Measurement

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Author(s): Wei Chu; Xuezeng Zhao; Joseph Fu; Theodore V. Vorburger;
Title: Study on an Image Stitching Method for Linewidth Measurement
Published: April 01, 2004
Abstract:
Conference: Proceedings of SPIE--the International Society for Optical Engineering
Proceedings: Photomask Japan
Volume: 5446
Issue: Pt. 2
Location: JA
Dates: April 14-16, 2004
Keywords: atomic force microscopy (AFM);image registration;image stiching method;linewidth;nanotube probe;sidewall
Research Areas: Metrology, Manufacturing