@conference{796371,
  author = {Wei Chu and Xuezeng Zhao and Joseph Fu and Theodore Vorburger},
  title = {Study on an Image Stitching Method for Linewidth Measurement},
  year = {2004},
  number = {5446},
  month = {2004-04-01 00:04:00},
  publisher = {Photomask Japan, , 1, JA},
  language = {en},
}