Electric Force Microscopy with a Single Carbon Nanotube Tip

Published

August 1, 2001

Author(s)

John A. Dagata, F S. Chien, S Gwo, K Morimoto, T Inoue, J Itoh, H Yokoyama

Abstract

Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM probe station instruments in which SPM-based lithography, topography, electric force microscopy, and traditional current-voltage measurements are performed simultaneously, or sequentially. As device dimensions shrink, traditional diagnostics will be unable to probe nanometer-scale phenomena that affect device performance and reliability. At the same time, the introduction of novel materials such as silicon-on-insulator into standard processing will require methods that can rapidly identify defects and their local behavior. Electric force microscopy with carbon nanotube tips offers unique capabilities for satisfying these needs.

Proceedings Title

Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor

Volume

4344

Conference Dates

February 26, 2001

Conference Location

Santa Clara, CA

Conference Title

AFM Metrology

Pub Type

Conferences

Keywords

carbon nanotube, electric force microscopy, lithography, scanned probe microscopy, silicon-on-insulator

Citation

Dagata, J. , Chien, F. , Gwo, S. , Morimoto, K. , Inoue, T. , Itoh, J. and Yokoyama, H. (2001), Electric Force Microscopy with a Single Carbon Nanotube Tip, Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA (Accessed April 18, 2024)