TY  - CONF
AU  - John Dagata
AU  - F Chien
AU  - S Gwo
AU  - K Morimoto
AU  - T Inoue
AU  - J Itoh
AU  - H Yokoyama
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2001
TI  - Electric Force Microscopy with a Single Carbon Nanotube Tip
ER  -