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Publication Citation: Tip and Surface Reconstruction in Scanned Probe Microscopy

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Author(s): John S. Villarrubia;
Title: Tip and Surface Reconstruction in Scanned Probe Microscopy
Published: January 01, 1997
Abstract: The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by estimation of the surface shape from the measured image (surface reconstruction). Published surface and tip reconstruction methods are reviewed.
Proceedings: Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST
Pages: 1 pp.
Location: Gaithersburg, MD
Dates: January 1, 1997
Keywords: atomic force microscopy;blind reconstruction;scanned probe microscopy;scanning tunneling microscopy;surface reconstruction;tip artifacts;tip estimation
Research Areas: Metrology, Manufacturing