| Author(s): |
James K. Olthoff; J R. Roberts; Richard J. Van Brunt; James R. Whetstone; Mark A. Sobolewski; S. Djurovic; |
| Title: |
Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors |
| Published: |
February 01, 1992 |
| Abstract: |
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| Proceedings: |
Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration |
| Pages: |
pp. 168 - 178 |
| Location: |
San Jose, CA |
| Dates: |
September 9-13, 1991 |
| Research Areas: |
Electronics & Telecommunications |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
