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Publication Citation: Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors

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Author(s): James K. Olthoff; J R. Roberts; Richard J. Van Brunt; James R. Whetstone; Mark A. Sobolewski; S. Djurovic;
Title: Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors
Published: February 01, 1992
Abstract:
Proceedings: Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration
Pages: pp. 168 - 178
Location: San Jose, CA
Dates: September 9-13, 1991
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)