TY  - CONF
AU  - James Olthoff
AU  - J Roberts
AU  - Richard Van Brunt
AU  - James Whetstone
AU  - Mark Sobolewski
AU  - S. Djurovic
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration, San Jose, CA
DA  - 1992-02-01 00:02:00
LA  - en
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration, San Jose, CA
PY  - 1992
TI  - Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=3907
ER  -