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Publication Citation: Structural, Electronic, and Dielectric Properties of Ultrathin Zirconia Films on Silicon

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Author(s): Safak Sayan; Nhan V. Nguyen; James R. Ehrstein; Tom Emge; Eric Garfunkel; Mark Croft; X Zhao; David V. Vanderbilt; Ira Levin; Evgeni Gusev; Hyunjung G. Kim;
Title: Structural, Electronic, and Dielectric Properties of Ultrathin Zirconia Films on Silicon
Published: November 17, 2005
Abstract:
Citation: Applied Physics Letters
Volume: 86
Pages: pp. 152902-1 - 152902-3
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (143KB)