@article{59926, author = {Safak Sayan and Nhan Nguyen and James Ehrstein and Tom Emge and Eric Garfunkel and Mark Croft and X Zhao and David Vanderbilt and Ira Levin and Evgeni Gusev and Hyunjung Kim}, title = {Structural, Electronic, and Dielectric Properties of Ultrathin Zirconia Films on Silicon}, year = {2005}, number = {86}, month = {2005-11-17}, publisher = {Applied Physics Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32146}, language = {en}, }