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Publication Citation: Semiconductor Microelectronics and Naoelectronics Programs

NIST Authors in Bold

Author(s): Stephen Knight; Joaquin (. Martinez; Michele L. Buckley;
Title: Semiconductor Microelectronics and Naoelectronics Programs
Published: July 01, 2005
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology, NIST, in fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
Citation: NIST Interagency/Internal Report (NISTIR) - NISTIR7235
Pages: 220 pp.
Keywords: interconnect and packaging,lithography,microelectronics,modeling,semiconductor,thin film,wafer characterization
Research Areas:
PDF version: PDF Document Click here to retrieve PDF version of paper (36MB)