TY  - GEN
AU  - Stephen Knight
AU  - Joaquin Martinez
AU  - Michele Buckley
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-07-01 00:07:00
DO  - https://doi.org/10.6028/NIST.ir.7235
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - Semiconductor Microelectronics and Naoelectronics Programs
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32023
ER  -