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Publication Citation: Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic

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Author(s): James K. Olthoff; Richard J. Van Brunt;
Title: Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic
Published: August 01, 1993
Abstract:
Citation: SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX
Pages: pp. .1 - 36
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (22MB)