Publication Citation
NIST Authors in Bold
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| Author(s): | James K. Olthoff; Richard J. Van Brunt; |
|---|---|
| Title: | Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic |
| Published: | August 01, 1993 |
| Abstract: | |
| Citation: | SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX |
| Pages: | pp. .1 - 36 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (21MB) |