TY  - VIDEO
AU  - James Olthoff
AU  - Richard Van Brunt
C2  - SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX
DA  - 1993-08-01 00:08:00
LA  - en
PB  - SEMATECH Technology Transfer Report 9304161A-XFR| publ. by SEMATECH: AustinTX
PY  - 1993
TI  - Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21541
ER  -