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Spectroscopy

News and Updates

Projects and Programs

The Research

Publications

Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Author(s)
Nathan Nakamura, Paul Szypryt, Amber Dagel, Bradley Alpert, Douglas Bennett, W.Bertrand (Randy) Doriese, Malcolm Durkin, Joseph Fowler, Dylan Fox, Johnathon Gard, Ryan Goodner, James Zachariah Harris, Gene C. Hilton, Edward Jimenez, Burke Kernen, Kurt Larson, Zachary H. Levine, Daniel McArthur, Kelsey Morgan, Galen O'Neil, Christine Pappas, Carl D. Reintsema, Dan Schmidt, Peter Schulz, Daniel Swetz, Kyle Thompson, Joel Ullom, Leila R. Vale, Courtenay Vaughan, Christopher Walker, Joel Weber, Jason Wheeler
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing

Software

Tools and Instruments

Awards

2015 French Award

The Judson C. French Award, first presented in 2000, is granted for significant improvement in products delivered directly to industry

2009 APS Fellow - Yuri Ralchenko

For significant contributions to the relativistic theory of highly-charged ions and collisional-radiative modeling, and through creation of