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Surface Data

The surface data category highlights databases that allow surface scientists, tribologists, and analytical chemists to analyze surfaces of materials.


The NIST X-ray Photoelectron Spectroscopy online database has been a valuable source of binding-energy and related data for the surface analysis of a wide range of materials by x-ray photoelectron spectroscopy.

The NIST Electron Elastic-Scattering Cross-Section Database provides values of differential elastic-scattering cross sections, total elastic-scattering cross sections, phase shifts, and transport cross sections for elements with atomic numbers from 1 to 96 and for electron energies between 50 eV and 300 keV (in steps of 1 eV). These data can be used in simulations of electron transport in Auger-electron spectroscopy, x-ray photoelectron spectroscopy, electron-probe microanalysis, and analytical electron microscopy.

The NIST Surface Structure Database provides 3-dimensional graphics to allow researchers to visualize the structures of crystal surfaces on the atomic scale.

The NIST Electron Inelastic-Mean-Free-Path Database provides values of electron inelastic mean free paths (IMFPs) for use in quantitative surface analyses by AES and XPS.

The NIST Electron Effective-Attenuation-Length Database provides values of electron effective attenuation lengths (EALs) for applications in AES and XPS.

The NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA) provides data for many parameters needed in quantitative Auger electron spectroscopy and X-ray photoelectron spectroscopy (differential inverse inelastic mean free paths, total inelastic mean free paths, differential and total elastic-scattering cross sections, transport cross sections, photoionization cross sections, photoionization asymmetry parameters, electron-impact ionization cross sections, photoelectron lineshapes, Auger-electron lineshapes, fluorescence yields, and Auger-electron backscattering factors). SESSA can also simulate Auger-electron and X-ray-photoelectron spectra of mulitlayered samples with compositions and thicknesses specified by the user. The simulated spectra can then be compared with measured spectra (for specified measurement conditions), and the layer compositions and thicknesses adjusted to find maximum consistency between simulated and measured spectra.

The NIST Backscattering-Correction-Factor Database for Auger Electron Spectroscopy provides values of the backscattering correction factor (BCF) for homogeneous samples. The BCF is an important matrix-correction factor in surface analyses by Auger-electron spectroscopy.

The codes in the list below have the following meanings:

PC PC product, most available for purchase, some are free
Online Free online system
DG Inclusion in the NIST Data Gateway - a portal providing access to many NIST scientific and technical databases. It is searchable by keyword, property, or substance name.
* Product contains data that have undergone rigorous critical evaluation by experienced researchers who recommend best values.
Online Subscription Product is a yearly subscription web product.

SRD 20 NIST X-ray Photoelectron Spectroscopy 4.1, PC, Online, DG, *
SRD 42 Surface Struture Database
SRD 64 NIST Electron Elastic-Scattering Cross-Section Database, PC, DG, *

SRD 71 NIST Electron Inelastic-Mean-Free-Path Database, PC, DG, *
SRD 82 NIST Electron Effective-Attenuation-Length Database, PC, DG, *
SRD 100 NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA), PC, DG, *
SRD 154 NIST Backscattering-Correction-Factor Database for Auger Electron Spectroscopy, PC, DG,*
SRD 164 NIST Database of Cross Sections for Inner-Shell Ionization by Electron or Positron Impact, PC, DG, *