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Semiconductors Programs & Projects

(showing 1 - 15 of 24)
Back-End-of-Line Reliability Metrology Development
Last Updated Date: 05/05/2015

The Back-End-of-Line (BEOL) Reliability Metrology Development project aims to develop the metrology to enable quantitative and mechanistic … more

CMOS Device and Reliability
Last Updated Date: 05/05/2015

The CMOS Device and Reliability Project develops advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide Semiconductor) … more

Micro- and Nanoelectromechanical Systems
Last Updated Date: 05/04/2015

Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more

Nanoelectronic Device Metrology
Last Updated Date: 04/23/2015

The Nanoelectronic Device Metrology (NEDM) project is developing the measurement science infrastructure that will enable emerging nanoelectronic … more

Acceleration, Vibration, and Acoustics
Last Updated Date: 04/23/2015

The Acceleration, Vibration, and Acoustics Project provides measurement services, and develops measurements and documentary standards for the SI … more

Physical Properties of Liquid Precursors
Last Updated Date: 04/02/2015

In striving to adhere to Moore's Law, the semiconductor industry is designing and using new metal-organic compounds. Precursor compounds deliver a … more

Novel Sources for Focused-ion Beams
Last Updated Date: 02/23/2015

Focused beams of ions have a wide range of uses, from nanoscale imaging to the fabrication of nanomaterials. In the CNST, researchers are … more

Thin Film and Interconnect Reliability
Last Updated Date: 01/28/2015

This project, now concluded, developed methods to evaluate the reliability of thin films and interconnects in their as-manufactured states. Such … more

Nanocalorimetry Measurements
Last Updated Date: 01/22/2015

To develop nanocalorimetry as a method for measuring heats of reaction of nanoscale samples with nanojoule sensitivity in order to detect … more

Nanoscale Stress Measurements and Standards
Last Updated Date: 01/22/2015

Our objective is to develop accurate measurement methods for the nanoscale stress distributions and surface defects that control device … more

Plasma Process Metrology
Last Updated Date: 01/20/2015

Our multifaceted program provides numerous outputs to assist our customers. First, we develop and evaluate a variety of measurement techniques … more

Analytical Transmission Scanning Electron Microscopy
Last Updated Date: 01/02/2015

This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable … more

Nanostructure Fabrication and Metrology
Last Updated Date: 12/11/2014

Single photons are the fundamental particles for all optical measurements. Single photon detectors made from avalanche photodiodes or … more

Metrology and Synthesis of 3D Nanostructures
Last Updated Date: 12/11/2014

Nanostructures are a critical component of innovations in electronics, energy conservation, renewable energy, biomedical research, and health … more

Quantum Materials and Devices
Last Updated Date: 12/11/2014

Quantum coherent materials have become important in magnetic sensors as well as information processing technology. For magnetic sensors, … more

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