Semiconductors Programs & Projects | |
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MEMS Measurement Science and Standards
Last Updated Date: 05/09/2013 Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more
Power Device and Thermal Metrology
Last Updated Date: 04/22/2013 The Power Devices and Thermal Metrology Project develops electrical and thermal measurement methods and equipment to support development and … more
CMOS Device and Reliability
Last Updated Date: 04/11/2013 The CMOS Device and Reliability Project will develop advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide … more
Back-End-of-Line Reliability Metrology Development
Last Updated Date: 04/11/2013 The Back-End-of-Line (BEOL) Reliability Metrology Development project aims to develop the metrology to enable quantitative and mechanistic … more
Nanoelectronic Device Metrology
Last Updated Date: 04/09/2013 The Nanoelectronic Device Metrology (NEDM) project is developing the measurement science infrastructure that will enable emerging … more
Thin Film Electronics
Last Updated Date: 04/08/2013 The Thin Film Electronics Project enables the commercialization of emerging and future semiconductor electronic device technologies, such as … more
Theory of the optical properties of materials
Last Updated Date: 03/26/2013 The overarching objective of this project is reliably calculating the bulk optical properties of materials, such as complex index of refraction, … more
Theory of Transport in Graphene
Last Updated Date: 03/21/2013 Graphene, a single layer of carbon atoms, is one of the most likely materials to produce the next breakthrough in the electronics … more
Nanoscale Stress Measurements and Standards
Last Updated Date: 03/15/2013 Our objective is to develop accurate measurement methods for the nanoscale stress distributions and surface defects that control device … more
Nanocalorimetry Measurements
Last Updated Date: 03/15/2013 To develop nanocalorimetry as a method for measuring heats of reaction of nanoscale samples with nanojoule sensitivity in order to detect … more
Thin Film and Interconnect Reliability
Last Updated Date: 01/04/2013 This project, now concluded, developed methods to evaluate the reliability of thin films and interconnects in their as-manufactured states. Such … more
Analytical Transmission Scanning Electron Microscopy
Last Updated Date: 12/07/2012 This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable … more
Thin Film X-Ray Reflectometry
Last Updated Date: 10/09/2012 Our goal is to develop Standard Reference Materials (SRMs) and quantitative, reproducible X-ray reflectometry (XRR) data analysis methods to … more
Physical Properties of Liquid Precursors
Last Updated Date: 10/02/2012 In striving to adhere to Moore's Law, the semiconductor industry is designing and using new metal-organic compounds. Precursor compounds … more
COMPLETED: Dimensional Metrology for Nanoscale Patterns
Last Updated Date: 10/02/2012 Our goal is to develop and demonstrate precise measurement methods that quantify the physical shape, critical dimensions (CD) and … more |
Contact
General Information:301-975-NIST (6478) inquiries@nist.gov 100 Bureau Drive, Stop 1070 Gaithersburg, MD 20899-1070 |