Holm, J.
, Caplins, B.
and Keller, R.
(2019),
A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope, TechConnect World Technical Proceedings, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927907
(Accessed June 1, 2024)
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A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope
Published
Author(s)
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Abstract
A new programmable detector for scanning transmission electron microscopy (pSTEM) is described. A digital micromirror array lies at the heart of the detector and serves as a programmable virtual objective aperture. Two sensors, a photomultiplier tube and a CMOS digital camera are used to enable real-space transmission imaging and on-axis diffraction, respectively. Detector operation is demonstrated with several samples in a conventional scanning electron microscope (SEM).Citation
TechConnect World Technical Proceedings
Volume
TechConnect Briefs 2019
Pub Type
Journals
Download Paper
Keywords
scanning, transmission, electron microscopy, diffraction, programmable
Citation
Issues
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Created June 17, 2019, Updated August 28, 2019