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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 21 to 30 of 73 records.
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21. Filter Transmittance Measurements in the Infrared
Topic: Optical Metrology
Published: 1/1/1993
Authors: Alan L Migdall, A Frenkel, Daniel E. Kelleher

22. Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction
Topic: Optical Metrology
Published: 9/5/2013
Authors: Jing Qin, Richard M Silver, Bryan M Barnes, Hui Zhou, Francois R. Goasmat
Abstract: There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimens ...

23. High precision, broadband optical measurements with fiber laser frequency combs
Topic: Optical Metrology
Published: 11/2/2010
Authors: Nathan Reynolds Newbury, Ian R Coddington, Esther Baumann, Fabrizio Raphael Giorgetta, William C Swann, Alexander M. Zolot
Abstract: Optical frequency combs have been used extensively, and with remarkable success, to measure the absolute frequency of cw lasers. The use of frequency combs has also expanded to include applications such as precision ranging, component metrology, and ...

24. Illuminance responsivity calibration of reference photometers at the NIST SIRCUS and SCF facilities
Topic: Optical Metrology
Published: 5/29/2009
Authors: George P Eppeldauer, Carl C Miller, Thomas C Larason, Yoshihiro Ohno
Abstract: The illuminance responsivities of two transfer standard photometers have been directly determined from their spectral responsivity calibrations at two different calibration facilities of NIST. The main characteristics of the two photometers, and thei ...

25. Imaging of Multi-Fiber, Micro-Mechanical Testing Specimens Using Optical Coherence Tomography
Topic: Optical Metrology
Published: 2/1/2001
Authors: Joy P Dunkers, Gale Antrus Holmes, Walter G McDonough
Abstract: In this initial work, we interfaced a micro-mechanical testing stage with the optical coherence tomography (OCT) instrument. We then demonstrated the feasibility of this approach by comparing OCT images of single and multi-fiber sample to optical mic ...

26. In-Situ Metrology to Characterize Water Vapor Delivery during Atomic Layer Deposition
Topic: Optical Metrology
Published: 5/2/2016
Authors: Tariq Ahmido, William Andrew Kimes, Brent A Sperling, Joseph Terence Hodges, James E Maslar
Abstract: Water is often employed as the oxygen source in metal oxide atomic layer deposition (ALD) processes. It has been reported that variations in the amount of water delivered during metal oxide ALD can impact the oxide film properties. Hence, one con ...

27. Infrared detector calibrations
Topic: Optical Metrology
Published: 3/22/2012
Authors: George P Eppeldauer, Vyacheslav B Podobedov
Abstract: An InSb working standard radiometer, first calibrated at NIST in 1999 against a cryogenic bolometer, was recently calibrated against a newly developed low-NEP pyroelectric transfer standard detector. The pyroelectric transfer standard, which can oper ...

28. Integrated silicon optomechanical transducers and their application in atomic force microscopy
Topic: Optical Metrology
Published: 7/31/2015
Authors: Jie J. Zou, Marcelo Ishihara Davanco, Yuxiang Liu, Thomas Michels, Kartik A Srinivasan, Vladimir A Aksyuk

29. Intercomparison between optical and x-ray scatterometry measurements of FinFET structures
Topic: Optical Metrology
Published: 4/8/2013
Authors: Paul Lemaillet, Thomas Avery Germer, Regis J Kline, Daniel Franklin Sunday, Chengqing C. Wang, Wen-Li Wu
Abstract: In this paper, we present a comparison of profile measurements of vertical field effect transistor (FinFET) fin arrays by optical critical dimension (OCD) metrology and critical dimension small angle X-ray scattering (CD-SAXS) metrology. Spectroscopi ...

30. Introduction to Journal of Modern Optics Special Issue on Single Photon: Sources, Detectors, Applications and Measurement Methods
Topic: Optical Metrology
Published: 1/20/2007
Authors: J Cheung, Alan L Migdall, Stefania Castelletto
Abstract: In October 2005, a 2-day follow up workshop, Single photon: sources, detectors, applications and measurement methods, was held at the NPL (National Physical Laboratory, UK). The focus for this workshop was to report on the key developments since the ...

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