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Topic Area: Optical Metrology
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Displaying records 111 to 120 of 139 records.
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111. Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes
Topic: Optical Metrology
Published: 7/29/2014
Authors: Ravikiran Attota, Ronald G Dixson
Abstract: We experimentally demonstrate that the three-dimensional (3-D) shape variations of nanometer-scale objects can be resolved and measured with sub-nanometer scale sensitivity using conventional optical microscopes by analyzing 3-D optical data using th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908543

112. SCATTERFIELD MICROSCOPY, REVIEW OF TECHNIQUES THAT PUSH THE FUNDAMENTAL LIMITS OF OPTICAL DEFECT METROLOGY
Topic: Optical Metrology
Published: 3/25/2013
Authors: Richard M Silver, Bryan M Barnes, Francois R. Goasmat, Hui H. Zhou, Martin Y Sohn
Abstract: The semiconductor manufacturing industry is now facing serious challenges in achieving defect detection rates with acceptable throughput and accuracy. With conventional bright-field and dark- field inspection methods now at their limits, it has b ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913246

113. Scalable multiplexed detector system for high-rate telecom-bandsingle-photon detection
Topic: Optical Metrology
Published: 11/25/2009
Authors: Sergey V Polyakov, Alan L Migdall, Giorgio Brida, Ivo P Degiovanni, Fabrizio Piacentini, V Schettini
Abstract: We present a photon-counting detection system at telecom wavelengths that overcomes the difficulties of photon-counting at high rates. Our detection system uses active multiplexing, an array of N detectors, and a 1-by-N optical switch with a control ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902508

114. Single molecule confocal fluorescence lifetime correlation spectroscopy for accurate nanoparticle size determination
Topic: Optical Metrology
Published: 5/15/2014
Authors: Bonghwan Chon, Kimberly A Briggman, Jeeseong Hwang
Abstract: We report on an experimental procedure in confocal single molecule fluorescence lifetime correlation spectroscopy (FLCS) to determine the range of excitation power and molecule concentration in solution under which the application of an unmodified ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914381

115. Spectral irradiance responsivity calibration of InSb radiometers using the improved IR-SIRCUS at NIST
Topic: Optical Metrology
Published: 10/15/2009
Authors: Jinan Zeng, Howard W Yoon, George P Eppeldauer, Leonard M Hanssen, Joseph Paul Rice
Abstract: The spectral irradiance responsivity calibrations of InSb radiometers measured on the tunable-laser based Infrared Spectral Irradiance and Radiance Responsivity Calibration with Uniform Sources (IR-SIRCUS) facility are discussed. This work describes ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903522

116. Spectral responsivity based calibration of photometer and colorimeter standards
Topic: Optical Metrology
Published: 6/19/2013
Author: George P Eppeldauer
Abstract: Several new generation transfer- and working-standard illuminance meters and tristimulus colorimeters have been developed at the National Institute of Standards and Technology (NIST) to measure all kinds of light sources with low uncertainty. The spe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913528

117. Spectrophotometer Linearity Testing Using the Double-Aperture Method
Topic: Optical Metrology
Published: 10/1/1972
Authors: Klaus Mielenz, K Eckerle
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620035

118. Standardization of Broadband UV Measurements
Topic: Optical Metrology
Published: 1/1/2013
Author: George P Eppeldauer
Abstract: The CIE standardized rectangular-shape UV response functions can be realized only with large spectral mismatch errors. The spectral power-distribution of UV sources is not standardized. Accordingly, the readings of different types of UV meters, even ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913173

119. Standardization of Broadband UV Measurements for 365 nm LED Sources
Series: Journal of Research (NIST JRES)
Report Number: 117.004
Topic: Optical Metrology
Published: 2/2/2012
Author: George P Eppeldauer
Abstract: Broadband UV measurements are analyzed when UV-A irradiance meters measure optical radiation from 365-nm sources. The CIE standardized rectangular-shape UV-A function can be realized only with large spectral mismatch errors. The spectral power-di ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909003

120. Statistical Methods for Analyzing Color Differences
Topic: Optical Metrology
Published: 6/2/2011
Authors: Maria E Nadal, Carl C Miller, Hugh Fairman
Abstract: Multi-valued measurands, such as spectral reflectance or transmission, tristimulus values, are usually analyzed by reducing the data to a single-valued parameter, such as color difference. The variations of sets of color differences are non-normal d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842550



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