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Topic Area: Optical Metrology
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Displaying records 101 to 110 of 112 records.
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101. TSOM Method for Semiconductor Metrology
Topic: Optical Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908177

102. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Optical Metrology
Published: 4/30/2013
Authors: Ravikiran Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913667

103. The Application of Optical Coherence Tomography to Problems in Polymer Matrix Composites
Topic: Optical Metrology
Published: 1/1/2001
Authors: Joy P Dunkers, Frederick R Phelan Jr, D P Sanders, M J Everett, William H. Green, Donald Lee Hunston, Richard~undefined~undefined~undefined~undefined~undefined Parnas
Abstract: The Composites Group at the National Institute of Standards and Technology has found optical coherence tomography (OCT) to be a powerful tool for non-destructive characterization of polymer matrix composites. Composites often exhibit superior proper ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851711

104. The Prediction of Permeability for an Epoxy/E-Glass Composite Using Optical Coherence Tomographic Images
Topic: Optical Metrology
Published: 12/1/2001
Authors: Joy P Dunkers, Frederick R Phelan Jr, C G Zimba, Kathleen M. Flynn, D P Sanders, R C Peterson, Richard~undefined~undefined~undefined~undefined~undefined Parnas
Abstract: Knowledge of the permeability tensor in liquid composite molding is important for process optimization. Unfortunately, experimental determination of permeability is difficult and time consuming. A rapid, non-destructive technique called optical coh ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851606

105. The-Final-State Symmetry of Na 1s Core-shell Excitons in NaCl and NaF
Topic: Optical Metrology
Published: 7/8/2009
Authors: Eric L Shirley, K. P. Nagle, G T Seidler, T. T. Fister, J. A. Bradley, F. C. Brown
Abstract: We report measurements of the Na 1s contribution to the nonresonant inelastic x-ray scattering (NRIXS) from NaCl and NaF. Prior x-ray absorption studies have observed two pre-edge excitons in both materials. The momentum transfer-dependence (q-depe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901581

106. Time and Frequency-Domain Spectroscopy with Dual Frequency Combs
Topic: Optical Metrology
Published: 5/28/2009
Authors: Nathan Reynolds Newbury, Ian R Coddington, William C Swann
Abstract: High-resolution spectroscopic measurements of the amplitude and phase spectra from a gas sample can be acquired by use of dual frequency combs. Here we discuss the corresponding gas signature in the time domain.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901109

107. Time-domain spectroscopy of the optical free-induction decay from vibrating molecules
Topic: Optical Metrology
Published: 4/26/2010
Authors: Ian R Coddington, William C Swann, Nathan Reynolds Newbury
Abstract: Time-domain spectroscopy using dual, coherent frequency combs is used to measure free-induction decay from a molecular gas sample in the near-IR with a time-domain signal-to-noise ratio of ~10^u6^ over a ~6 ns window at 55 fs time resolution (corresp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903774

108. Tunable Supercontinuum Fiber Laser Source for BRDF Measurements in the STARR II Gonioreflectometer
Topic: Optical Metrology
Published: 9/27/2012
Authors: Heather J Patrick, Clarence Joseph Zarobila, Thomas Avery Germer, Victor Alan Ying, Catherine C Cooksey, Benjamin K Tsai
Abstract: STARR II is a planned NIST facility for spectral measurements of specular reflectance and diffuse bidirectional reflectance distribution function (BRDF) that is the follow-on to the current NIST STARR (Spectral Tri-function Automated Reference Reflec ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912019

109. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Optical Metrology
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698

110. Vibration immune fiber-laser frequency comb based on a polarization-maintaining figure-eight laser
Topic: Optical Metrology
Published: 5/20/2009
Authors: Fabrizio Raphael Giorgetta, Esther Baumann, Jeffrey W. Nicholson, William C Swann, Ian R Coddington, Nathan Reynolds Newbury
Abstract: A frequency comb is phase-locked to a cw laser with an electro-optic-modulator providing 1.6 MHz feedback bandwidth. Residual phase noise is as low as -94 dBc/Hz, and the comb remained locked under mechanical vibration of up to 1.9 g.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901116



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