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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 51 to 53.
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51. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Optical Metrology
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698

52. Wavelength References for Optical Interferometry
Topic: Optical Metrology
Published: 6/12/2005
Authors: Richard W Fox, Leo W. Hollberg
Abstract: We are exploring air wavelength references useful for interferometry. Femtosecond comb frequency measurements determine mode wavelengths of a stable optical cavity in vacuum, and subsequently a tunable laser is locked to the modes in air.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30063

53. Weak value thermostat with 0.2 mK precision
Topic: Optical Metrology
Published: 12/1/2012
Authors: Patrick F Egan, Jack A Stone Jr.
Abstract: A new laser-based thermostat sensitive to 0.2 mK at room temperature is reported. The method utilizes a fluid-filled prism and interferometric weak value amplification to sense nanoradian deviations of a laser beam: due to the high thermooptic coef ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912232



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