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You searched on: Topic Area: Optical Metrology

Displaying records 21 to 30 of 55 records.
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21. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912169

22. Measuring Single-Walled Carbon Nanotube Length Distributions from Diffusional Trajectories
Topic: Optical Metrology
Published: 8/27/2012
Authors: Jason Streit, Sergei M Bachilo, Anton V Naumov, Constantine Y. Khripin, Ming Zheng, R Bruce Weisman
Abstract: A new method is demonstrated for measuring the length distributions of dispersed single-walled carbon nanotube (SWCNT) samples by analyzing diffusional motions of many individual nanotubes in parallel. In this method, termed Length Analysis by Na ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911770

23. A compact and robust method for full Stokes spectropolarimetry
Topic: Optical Metrology
Published: 8/1/2012
Authors: William Sparks, Thomas Avery Germer, John MacKenty, Frans Snik
Abstract: We present an approach to spectropolarimetry which requires neither moving parts nor time dependent modulation, and which o ers the prospect of achieving high sensitivity. The concept, which is one of those generically known as channeled polarimetry, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911231

24. Lunar Spectral Irradiance and radiance (LUSI): new instrumentation to characterize the Moon as a space-based radiometric standard
Series: Journal of Research (NIST JRES)
Report Number: 117.011
Topic: Optical Metrology
Published: 7/17/2012
Authors: Allan W. Smith, Steven Ray Lorentz, Raju Vsnu Datla, Thomas C. Stone
Abstract: The need to understand and monitor climate change has led to proposed radiometric accuracy requirements for space-based remote-sensing instruments that are very stringent and currently beyond the reach of many Earth orbiting instruments. A major ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903135

25. Infrared detector calibrations
Topic: Optical Metrology
Published: 3/22/2012
Authors: George P Eppeldauer, Vyacheslav B Podobedov
Abstract: An InSb working standard radiometer, first calibrated at NIST in 1999 against a cryogenic bolometer, was recently calibrated against a newly developed low-NEP pyroelectric transfer standard detector. The pyroelectric transfer standard, which can oper ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910831

26. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905395

27. Microwave generation with low residual phase noise from a femtosecond fiber laser with an intracavity electro-optic modulator
Topic: Optical Metrology
Published: 11/14/2011
Authors: William C Swann, Esther Baumann, Fabrizio Raphael Giorgetta, Nathan Reynolds Newbury
Abstract: Low phase-noise microwave generation has previously been demonstrated using self-referenced frequency combs to divide down a low noise optical reference. We demonstrate an approach based on a fs Er-fiber laser that avoids the complexity of self-refer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909568

28. THz Spectroscopic Study of Rust Layer on Aged Steel-Reinforced Structural Components
Topic: Optical Metrology
Published: 9/26/2011
Authors: David F Plusquellic, Virgil Provenzano, Shin G. Chou
Abstract: In this study, we use THz-based spectroscopy as a non-destructive diagnostic tool to characterize the corrosion by-products (rust) on aged iron structural components. Even though previous Mossbauer spectroscopic findings suggested the presence of an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907023

29. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907243

30. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805



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