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Displaying records 1 to 10 of 88 records.
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1. 193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology
Topic: Metrology
Published: 8/24/2009
Authors: Martin Y Sohn, Richard Quintanilha, Bryan M Barnes, Richard M Silver
Abstract: An angle-resolved scatterfield microscope (ARSM( feating 193 nm excimer laser light wa developed for measuring critical dimension (CD) and overlay of nanoscale targets as used in semiconductor metrology. The microscope is designed to have a wide and ...

2. 2011 Solutions in Perception Challenge Performance Metrics and Results
Topic: Metrology
Published: 3/22/2012
Authors: Jeremy A Marvel, Tsai Hong Hong, Elena R Messina
Abstract: The 2011 Solutions in Perception Challenge (SPC) presented an international collection of teams with the opportunity to develop algorithms that could positively identify and accurately locate in space an arbitrary collection of artifacts. Researchers ...

3. 3D Ground-Truth Systems for Object/Human Recognition and Tracking
Topic: Metrology
Published: 6/28/2013
Authors: Afzal A Godil, Roger V Bostelman, Kamel S Saidi, William P Shackleford, Geraldine S Cheok, Michael O Shneier, Tsai Hong Hong
Abstract: We have been researching 3D ground-truth systems for performance evaluation of vision and perception systems in the fields of smart manufacturing and robotics safety. In this paper we first present an overview of different systems that have been used ...

4. A Humidity Generator for Temperatures to 200 °C and Pressures to 1.6 MPa
Topic: Metrology
Published: 11/30/2012
Authors: D Vega-Maza, W Wyatt Miller, Dean C Ripple, Gregory E Scace
Abstract: We have constructed a new humidity generator that produces gas streams of known moisture content at temperatures from 85 °C to 200 °C, absolute pressures from 0.2 MPa to 1.6 MPa, and relative humidities from 10 % to 90 %. The generator produces a moi ...

5. A Prototype IEEE 1451.4 Smart Transducer Interface for Sensors and Actuators
Topic: Metrology
Published: 8/19/2011
Authors: Yuyin Song, David Michael Westbrook, Kang B Lee
Abstract: Analog transducers (sensors or actuators) are widely used in industry. The Institute of Electrical and Electronics Engineers (IEEE) 1451.4 standard defines a mixed-mode communication protocol and the Transducer Electronic Data Sheet (TEDS) formats fo ...

6. A Reference Standard for Measuring Humidity of Air Using a Re-entrant Radio Frequency Resonator
Topic: Metrology
Published: 5/2/2006
Authors: Peter H. Huang, Dean C Ripple, Michael R Moldover, Gregory E Scace
Abstract: We developed a stable reference hygrometer suitable for operation at temperatures above ambient that has a robust design, inherent stability, and a well-understood theory of measurement. This hygrometer uses a reentrant, radio-frequency, cavity reson ...

7. A Sensor-Based Method for Diagnostics of Machine Tool Linear Axes
Topic: Metrology
Published: 10/24/2015
Authors: Gregory W Vogl, Brian A Weiss, M Alkan Donmez
Abstract: A linear axis is a vital subsystem of machine tools, which are vital systems within many manufacturing operations. When installed and operating within a manufacturing facility, a machine tool needs to stay in good condition for parts production. All ...

8. Accurate Measurements of Process Gas Flow with Laminar Flow Meters
Topic: Metrology
Published: 10/15/2010
Authors: Thiago Cobu, Robert F Berg, John D Wright, Michael R Moldover
Abstract: We calibrated three models of commercially-manufactured, laminar flow meters (LFMs) with nitrogen at four pressures (100 kPa, 200 kPa, 300 kPa, and 400 kPa) over a 10:1 flow range using NIST‰s primary flow standards and a physical model. Without addi ...

9. Additive Manufacturing Round Robin Protocols: A Pilot Study
Topic: Metrology
Published: 8/12/2015
Authors: Shawn P Moylan, Joshua Land, Antonio M Possolo
Abstract: As the number of users of additive manufacturing (AM) steadily increases, and considering their demand for material and process specifications, the need for standard protocols for round robin studies is increasing accordingly. Researchers at the Nat ...

10. Airspeed Calibration Services: Laser Doppler Anemometer Calibration and Its Uncertainty
Topic: Metrology
Published: 6/20/2012
Authors: Iosif I Shinder, Michael R Moldover, James M Hall, Mike Duncan, Joe Keck
Abstract: The National Institute of Standards and Technology (NIST) and the Oak Ridge National Laboratory (ORNL) are improving their airspeed calibration services. Both laboratories use spinning disks to generate linear velocities that are traceable to NIST‰s ...

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  • SP 250-XX: Calibration Services
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  • SP 300-XX: Precision Measurement and Calibration
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