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Topic Area: Metrology
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Displaying records 1 to 10 of 851 records.
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1. Dependency of Morphology on Miscut Angle for Si(111) Etched in NH^d4^F
Topic: Metrology
Published: 5/1/2003
Authors: Joseph Fu, Hui Zhou, John A Kramar, Richard M Silver, S Gonda
Abstract: Using scanning probe microscopy, we have examined the surfaces produced by etching several different vicinal Si(111) samples in NH^d4^F aqueous solution. In agreement with others, we found that deoxygenation of the etchant generally reduces the numbe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823151

2. 1/N Feynman Machines as a Path to Ultraminiaturization
Topic: Metrology
Published: 9/1/1995
Author: E Clayton Teague
Abstract: The possibility of implementing Feynman''s proposal for achieving ultraminiaturization by an iterative process of three-dimensional machines making ever-smaller three-dimensional machines is considered in the nature of a thought experiment. A large a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820781

3. 193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology
Topic: Metrology
Published: 8/24/2009
Authors: Martin Y Sohn, Richard Quintanilha, Bryan M Barnes, Richard M Silver
Abstract: An angle-resolved scatterfield microscope (ARSM( feating 193 nm excimer laser light wa developed for measuring critical dimension (CD) and overlay of nanoscale targets as used in semiconductor metrology. The microscope is designed to have a wide and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903754

4. 1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards
Topic: Metrology
Published: 1/1/2000
Author: Richard M Silver
Abstract: This is the final report for the SEMATECH funded SEMATECH/NIST contract for the development of atom-based standard artifacts. This report is intended to summarize the progress completed on the technical elements and is intended as a general release d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820978

5. 20 Degrees Celsius--A Short History of the Standard Reference Temperature for Industrial Dimensional Measurements
Series: Journal of Research (NIST JRES)
Topic: Metrology
Published: 1/1/2007
Author: Theodore D Doiron
Abstract: While most dimensional metrologists know that the reference temperature for dimensional measurements is 20  C, very few know how or why that temperature was chosen.  Many people have thought it was, in some sense, arbitrary.  In actual ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823211

6. 2005 Metrology for a New Science: Advanced Metrology Needs
Topic: Metrology
Published: 1/1/2005
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822383

7. 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology
Topic: Metrology
Published: 1/1/2005
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822384

8. 2011 Solutions in Perception Challenge Performance Metrics and Results
Topic: Metrology
Published: 3/22/2012
Authors: Jeremy A Marvel, Tsai Hong Hong, Elena R Messina
Abstract: The 2011 Solutions in Perception Challenge (SPC) presented an international collection of teams with the opportunity to develop algorithms that could positively identify and accurately locate in space an arbitrary collection of artifacts. Researchers ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910645

9. 2D and 3D Surface Texture Comparisons Using Autocorrelation Functions
Topic: Metrology
Published: 1/1/2005
Authors: Jun-Feng Song, Li Ma, Eric Paul Whitenton, Theodore Vincent Vorburger
Abstract: Autocorrelation and cross-correlation functions are proposed for 2D and 3D surface texture comparisons. At the maximum correlaton point of the two correlated surface textrues, there is a peak shown at the cross-correaltion curve. It is proposed to ge ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822017

10. 2D and 3D Surface Texture Comparisons Using Autocorrelation Functions
Topic: Metrology
Published: 1/1/2005
Authors: Jun-Feng Song, Li Ma, Eric Paul Whitenton, Theodore Vincent Vorburger
Abstract: Autocorrelation and cross-correlation functions are proposed for 2D and 3D surface texture comparisons. At the maximum correlation point of the two correlated surface textures, there is a peak shown at the cross-correlation curve. It is proposed to g ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901999



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