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Author: Nien Zhang
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1. Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
Richard M Silver, Bryan M Barnes, Nien F Zhang, Hui H. Zhou, Andras Vladar, John S Villarrubia, Regis J Kline, Daniel Franklin Sunday, Alok Vaid
There has been significant interest in hybrid metrology as a novel method for reducing overall measurement uncertainty and optimizing measurement throughput (speed) through rigorous combinations of two or more different measurement techniques into a ...
2. Development of a Standard Reference Material for Metabolomics Research
Karen W Phinney, Guillaume Ballihaut, Mary Bedner, Johanna Camara, Steven J Christopher, William C Davis, Nathan G. Dodder, Brian E Lang, Stephen E Long, Mark S Lowenthal, Elizabeth A. McGaw, Karen E Murphy, Bryant C Nelson, Jocelyn L. Prendergast, Jessica L Reiner, Catherine A Rimmer, Lane C Sander, Michele M Schantz, Katherine E Sharpless, Lorna Tregoning Sniegoski, Susan Shu Cheng Tai, Jeanice M Brown Thomas, Thomas W Vetter, Michael James Welch, Stephen A Wise, Laura J Wood, William F Guthrie, Robert Charles Hagwood, Stefan D Leigh, James H Yen, Nien F Zhang, Madhu Chaurhary-Webb, Huiping Chen, Bridgette Haynes, Donna J LaVoie, Leslie F McCoy, Shahzad S Momin, Neelima Paladugula, Elizabeth C Pendergrast, Christine M Pfeiffer, Carissa D Powers, Zia Fazili-Qari, Daniel Rabinowitz, Michael E Rybak, Rosemary L Schleicher, Mary Xu, Mindy Zhang, Arthur L Castle, Brandi S Benford, Gauthier Eppe
3. Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach
Nien F Zhang, Richard M Silver, Hui H. Zhou, Bryan M Barnes
Recently, there has been significant research investigating new optical technologies for dimensional metrology of features 22 nm in critical dimension and smaller. When modeling optical measurements, a library of curves is assembled through the simul ...
4. SIM.EM-S5 Voltage, Current and Resistance Comparison
Harold Sanchez, Lucas Di Lillo, Gregory Kyriazis, Rodrigo Ramos, Randolph E Elmquist, Nien F Zhang
This paper reports the results of the second Interamerican Metrology System (SIM) comparison on calibration of digital multimeters, performed for strengthening the interaction among National Metrology Institutes (NMIs) and for establishing the degree ...
5. A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy
Richard M Silver, Nien F Zhang, Bryan M Barnes, Jing Qin, Hui H. Zhou, Ronald G Dixson
We present a method to combine measurements from different techniques that reduces uncertainties and can improve measurement throughput. The approach directly integrates the measurement analysis of multiple techniques that can include different conf ...
6. Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
Richard M Silver, Nien F Zhang, Bryan M Barnes, Hui H. Zhou, Jing Qin, Ronald G Dixson
In this paper we present a method to combine measurement techniques that reduce uncertainties and improve measurement throughput. The approach has immediate utility when performing model-based optical critical dimension measurements. When modeling ...
7. Linking the Results of CIPM and RMO Key Comparisons with Linear Trends
Journal of Research (NIST JRES)
Nien F Zhang
A statistical approach to link the results of interlaboratory comparisons with linear trends is proposed. This approach can be applied to the case that the comparisons have the same nominal values or of a same magnitude. The degrees of equivalence be ...
8. Certification of Drugs of Abuse in a Human Serum Standard Reference Material: SRM 1959
Susan Shu Cheng Tai, Jocelyn L. Prendergast, Lorna Tregoning Sniegoski, Michael James Welch, Karen W Phinney, Nien F Zhang
A new Standard Reference Material (SRM) for drugs of abuse in human serum (SRM 1959) has been
developed. SRM 1959 is a frozen human serum material fortified with seven drugs of abuse,
benzoylecgonine (BZE), methadone (METH), methamphetamine (MAM ...
9. Comparisons of Estimators of process standard deviation in constructing Shewhart control charts with unequal subgroup sizes
Nien F Zhang, P Winkel
The and control charts with unequal subgroup size have been discussed in the literature and used in practice. Several estimators of the process standard deviation based on sample standard deviations have been proposed in constructing the charts. We d ...
10. Angle-resolved Optical Metrology using Multi-Technique Nested Uncertainties
Richard M Silver, Bryan M Barnes, Hui H. Zhou, Nien F Zhang, Ronald G Dixson
This paper introduces recent advances in scatterfield microscopy using improved normalization and fitting procedures. Reduced measurement uncertainties are obtained through the use of more accurate normalization procedures in combination with better ...