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You searched on: Author: Nien Zhang

Displaying records 1 to 10 of 68 records.
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1. Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
Published: 3/19/2015
Authors: Mark Alexander Henn, Richard M Silver, Nien F Zhang, Hui H. Zhou, Bryan M Barnes, Bin Ming, Andras Vladar, John S Villarrubia
Abstract: Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=918217

2. Monitoring Process Variability for Stationary Process Data
Published: 6/20/2014
Authors: Nien F Zhang, Adam L Pintar
Abstract: Processes that arise naturally, e.g., from manufacturing or the environment, often exhibit complicated autocorrelation structures. When monitoring such a process for changes in variance, accounting for that autocorrelation structure is critical. Wh ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913557

3. Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
Published: 4/14/2014
Authors: Richard M Silver, Bryan M Barnes, Nien F Zhang, Hui H. Zhou, Andras Vladar, John S Villarrubia, Regis J Kline, Daniel Franklin Sunday, Alok Vaid
Abstract: There has been significant interest in hybrid metrology as a novel method for reducing overall measurement uncertainty and optimizing measurement throughput (speed) through rigorous combinations of two or more different measurement techniques into a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915846

4. Development of a Standard Reference Material for Metabolomics Research
Published: 11/4/2013
Authors: Karen W Phinney, Guillaume Ballihaut, Mary Bedner, Johanna Camara, Steven J Christopher, William C Davis, Nathan G. Dodder, Brian E Lang, Stephen E Long, Mark S Lowenthal, Elizabeth A. McGaw, Karen E Murphy, Bryant C Nelson, Jocelyn L. Prendergast, Jessica L Reiner, Catherine A Rimmer, Lane C Sander, Michele M Schantz, Katherine E Sharpless, Lorna Tregoning Sniegoski, Susan Shu Cheng Tai, Jeanice M Brown Thomas, Thomas W Vetter, Michael James Welch, Stephen A Wise, Laura J Wood, William F Guthrie, Robert Charles Hagwood, Stefan D Leigh, James H Yen, Nien F Zhang, Madhu Chaurhary-Webb, Huiping Chen, Bridgette Haynes, Donna J LaVoie, Leslie F McCoy, Shahzad S Momin, Neelima Paladugula, Elizabeth C Pendergrast, Christine M Pfeiffer, Carissa D Powers, Zia Fazili-Qari, Daniel Rabinowitz, Michael E Rybak, Rosemary L Schleicher, Mary Xu, Mindy Zhang, Arthur L Castle, Brandi S Benford, Gauthier Eppe
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912559

5. Regional homogenization of surface temperature records using robust statistical methods
Published: 9/12/2013
Authors: Adam L Pintar, Antonio M Possolo, Nien F Zhang
Abstract: An algorithm is described and applied to estimate and remove spurious influences from the surface temperature record at a meteorological station, which may be due to changes in the location of the station or in its environment, or in the method used ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911925

6. Statistical Methods for Change-Point Detection in Surface Temperature Records
Published: 9/12/2013
Authors: Adam L Pintar, Antonio M Possolo, Nien F Zhang
Abstract: We describe several statistical methods to detect possible change-points in a time series of values of surface temperature measured at a meteorological station, and to assess the statistical significance of such changes, taking into account the natur ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911926

7. Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach
Published: 8/30/2012
Authors: Nien F Zhang, Richard M Silver, Hui H. Zhou, Bryan M Barnes
Abstract: Recently, there has been significant research investigating new optical technologies for dimensional metrology of features 22 nm in critical dimension and smaller. When modeling optical measurements, a library of curves is assembled through the simul ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907847

8. SIM.EM-S5 Voltage, Current and Resistance Comparison
Published: 6/1/2012
Authors: Harold Sanchez, Lucas Di Lillo, Gregory Kyriazis, Rodrigo Ramos, Randolph E Elmquist, Nien F Zhang
Abstract: This paper reports the results of the second Interamerican Metrology System (SIM) comparison on calibration of digital multimeters, performed for strengthening the interaction among National Metrology Institutes (NMIs) and for establishing the degree ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910567

9. A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy
Published: 7/31/2011
Authors: Richard M Silver, Nien F Zhang, Bryan M Barnes, Jing Qin, Hui H. Zhou, Ronald G Dixson
Abstract: We present a method to combine measurements from different techniques that reduces uncertainties and can improve measurement throughput. The approach directly integrates the measurement analysis of multiple techniques that can include different conf ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908377

10. Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
Published: 4/18/2011
Authors: Richard M Silver, Nien F Zhang, Bryan M Barnes, Hui H. Zhou, Jing Qin, Ronald G Dixson
Abstract: In this paper we present a method to combine measurement techniques that reduce uncertainties and improve measurement throughput. The approach has immediate utility when performing model-based optical critical dimension measurements. When modeling ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908290



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