NIST logo

Publications Portal

You searched on: Author: Nien Zhang

Displaying records 1 to 10 of 72 records.
Resort by: Date / Title


1. Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
Published: 11/12/2015
Authors: Mark Alexander Henn, Richard M Silver, John S Villarrubia, Nien F Zhang, Hui Zhou, Bryan M Barnes, Andras Vladar, Bin Ming
Abstract: Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=918701

2. Use of Bayesian Statistics to Improve Optical Measurement Uncertainty by Combined Multi-Tool Metrology
Published: 6/25/2015
Authors: Nien F Zhang, Richard M Silver, Hui Zhou, Bryan M Barnes
Abstract: Recently, there has been significant research investigating new optical technologies for dimensional metrology of features 32 nm in critical dimension and smaller. When modeling optical measurements a library of curves is assembled through the simula ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=918375

3. The effect of systematic errors on the hybridization of optical critical dimension measurements
Published: 6/21/2015
Authors: Mark Alexander Henn, Richard M Silver, Nien F Zhang, Hui Zhou, Bryan M Barnes
Abstract: In hybrid metrology two or more measurements of the same measurand are combined to provide a more reliable result that ideally incorporates the individual strengths of each of the measurement methods. While these multiple measurements may come from d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=918395

4. Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
Published: 3/19/2015
Authors: Mark Alexander Henn, Richard M Silver, Nien F Zhang, Hui Zhou, Bryan M Barnes, Bin Ming, Andras Vladar, John S Villarrubia
Abstract: Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=918217

5. Monitoring Process Variability for Stationary Process Data
Published: 6/20/2014
Authors: Nien F Zhang, Adam L Pintar
Abstract: Processes that arise naturally, e.g., from manufacturing or the environment, often exhibit complicated autocorrelation structures. When monitoring such a process for changes in variance, accounting for that autocorrelation structure is critical. Wh ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913557

6. Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
Published: 4/14/2014
Authors: Richard M Silver, Bryan M Barnes, Nien F Zhang, Hui Zhou, Andras Vladar, John S Villarrubia, Regis J Kline, Daniel Franklin Sunday, Alok Vaid
Abstract: There has been significant interest in hybrid metrology as a novel method for reducing overall measurement uncertainty and optimizing measurement throughput (speed) through rigorous combinations of two or more different measurement techniques into a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915846

7. Development of a Standard Reference Material for Metabolomics Research
Published: 11/4/2013
Authors: Karen W Phinney, Guillaume Ballihaut, Mary Bedner, Johanna Camara, Steven J Christopher, William C Davis, Nathan G. Dodder, Brian E Lang, Stephen E Long, Mark S Lowenthal, Elizabeth A. McGaw, Karen E Murphy, Bryant C Nelson, Jocelyn L. Prendergast, Jessica L Reiner, Catherine A Rimmer, Lane C Sander, Michele Miller Schantz, Katherine E Sharpless, Lorna Tregoning Sniegoski, Susan Shu Cheng Tai, Jeanice M Brown Thomas, Thomas W Vetter, Michael James Welch, Stephen Albert Wise, Laura J Wood, William F Guthrie, Robert Charles Hagwood, Stefan D Leigh, James H Yen, Nien F Zhang, Madhu Chaurhary-Webb, Huiping Chen, Bridgette Haynes, Donna J LaVoie, Leslie F McCoy, Shahzad S Momin, Neelima Paladugula, Elizabeth C Pendergrast, Christine M Pfeiffer, Carissa D Powers, Zia Fazili-Qari, Daniel Rabinowitz, Michael E Rybak, Rosemary L Schleicher, Mary Xu, Mindy Zhang, Arthur L Castle, Brandi S Benford, Gauthier Eppe
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912559

8. Regional Homogenization of Surface Temperature Records Using Robust Statistical Methods
Published: 9/12/2013
Authors: Adam L Pintar, Antonio M Possolo, Nien F Zhang
Abstract: An algorithm is described and applied to estimate and remove spurious influences from the surface temperature record at a meteorological station, which may be due to changes in the location of the station or in its environment, or in the method used ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911925

9. Statistical Methods for Change-Point Detection in Surface Temperature Records
Published: 9/12/2013
Authors: Adam L Pintar, Antonio M Possolo, Nien F Zhang
Abstract: We describe several statistical methods to detect possible change-points in a time series of values of surface temperature measured at a meteorological station, and to assess the statistical significance of such changes, taking into account the natur ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911926

10. Improving Optical Measurement Uncertainty with Combined Multitool Metrology Using a Bayesian Approach
Published: 8/30/2012
Authors: Nien F Zhang, Richard M Silver, Hui Zhou, Bryan M Barnes
Abstract: Recently, there has been significant research investigating new optical technologies for dimensional metrology of features 22 nm in critical dimension and smaller. When modeling optical measurements, a library of curves is assembled through the simul ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907847



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series