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You searched on: Author: Premsagar Kavuri

Displaying records 1 to 10 of 11 records.
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1. Nanoparticle size determination using optical microscopes
Published: 10/27/2014
Authors: Ravikiran Attota, Richard J Kasica, Premsagar Purushotham Kavuri, Hyeong Gon (Hyeonggon) Kang, Lei NMN Chen
Abstract: We present a simple method for size determination of nanoparticles using conventional optical microscopes. The method, called through-focus scanning optical microscopy (TSOM), makes use of the four-dimensional optical information collected at differe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914209

2. Mechanical property changes in porous low-k dielectric thin films during processing
Published: 10/15/2014
Authors: Gheorghe Stan, Richard Swift Gates, Premsagar Purushotham Kavuri, Jessica Torres, David Michalak, Canay Ege, Jeff Bielefeld, Sean W King
Abstract: The design of future generations of Cu-low-k dielectric interconnects with reduced electronic crosstalk often requires engineering materials with an optimal trade off between their dielectric constant and elastic modulus. This is because the benefits ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916271

3. Does Your SEM Really Tell the Truth? How Would You Know? Part 2
Published: 5/30/2014
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM)has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The improvements have significantly enriched and augmented the overall SEM performance ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915610

4. Does Your SEM Really Tell the Truth? Part 2
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The first paper in this series, discussed some of the issues related to signal generat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913866

5. Nanomanufacturing Concerns about Measurements made in the SEM II: Specimen Contamination
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many and diverse scientific and industrial applications. The improvements that have been made have significantly improved the overall SEM per ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914028

6. Nanoparticle Size and Shape Evaluation Using the TSOM Method
Published: 6/1/2012
Authors: Bradley N Damazo, Ravikiran Attota, Premsagar Purushotham Kavuri, Andras Vladar
Abstract: A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911138

7. Characterization and Resistive Switching Properties of Solution-Processed HfO2, HfSiO4, and ZrSiO4 Thin Films on Rigid and Flexible Substrates
Published: 12/7/2011
Authors: Joseph Leo Tedesco, Walter Zheng, Oleg A Kirillov, Sujitra Jeanie Pookpanratana, Hyuk-Jae Jang, Premsagar Purushotham Kavuri, Nhan V Nguyen, Curt A Richter
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910358

8. Accurate Nanometer-Scale Imaging and Measurements with SEM
Published: 8/18/2011
Authors: Bradley N Damazo, Bin Ming, Premsagar Purushotham Kavuri, Andras Vladar, Michael T Postek
Abstract: Scanning electron microscopes (SEMs) are incredibly versatile instruments for millimeter to nanometer scale imaging and measurements of size and shape. New methods to improve repeatability and accuracy have been implemented on the so-called Referenc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909147

9. AFM characterization of nanopositioner in-plane stiffnesses
Published: 8/19/2010
Authors: Seung Ho Yang, Yong Sik Kim, Premsagar Purushotham Kavuri, Jae M. Yoo, Young M. Choi, Nicholas G Dagalakis
Abstract: A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906223

10. Nanoparticle size and shape evaluation using the TSOM optical microscopy method
Published: 6/6/2010
Authors: Ravikiran Attota, Richard J Kasica, Lei NMN Chen, Premsagar Purushotham Kavuri, Richard M Silver, Andras Vladar
Abstract: We present a novel optical TSOM (through-focus scanning optical microscopy - pronounced as 'tee-som') method that produces nanoscale dimensional measurement sensitivity using a conventional optical microscope. The TSOM method uses optical information ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905490



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