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You searched on: Author: James Olthoff

Displaying records 1 to 10 of 134 records.
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1. The NIST Plan for Providing Public Access to Results of Federally Funded Research
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 8084
Published: 10/27/2015
Authors: Katherine E Sharpless, Regina Lorraine Avila, Sally Skidmore Bruce, Wo L Chang, Robert M Dimeo, Virginia Covahey, Alan K Dohne, Heather M Evans, Aaron P Fein, Donna J Kimball, Andrea M Medina-Smith, Alan Edwin Munter, James K Olthoff, Dianne L Poster, Kathleen M Roberts, Susannah B Schiller, John Henry j Scott, Barbara P Silcox, James A St Pierre, Mark D Stiles
Abstract: Documentation of the evolution of NIST's plan for providing public access to results of federally funded research is provided, including the plan itself, responses to comments made by NIST staff, and public comments received in response to a requ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=919416

2. Fundamental Electron Interactions with Plasma Processing Gases
Published: 11/1/2003
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: This volume deals with the basic knowledge and undestanding of fundamtal interactions of low energy electrons with molecules. It provides an up-to-date and comprehensive account of the fundamental interactions of low energy energy electrons with mole ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31439

3. Electricity Division Programs, Activities, and Accomplishments
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6953
Published: 5/21/2003
Authors: James K Olthoff, Barry A. Bell
Abstract: This book describes the research programs, activities, and recent accomplishments of the Electricity Division organized by research project. After the project descriptions is a list of the calibration services that the Division provides, NRC Postdoct ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30928

4. Electron Interactions with BCL^d3^
Published: 12/1/2002
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: In this paper we review and assess the cross sections for collisions of low-energy electrons with boron trichloride (BCI3). The only available experimental cross section data are for partial and total ionization and electron attachment, and the elec ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27780

5. Electron Interactions with Plasma Processing Gases: Present Status and Future Needs
Published: 9/9/2002
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: The work conducted at the National Institute of Standards and Technology over the last 7 years on the systematic synthesis and assessment of fundamental knowledge on low-energy electron interactions with plasma processing gases is briefly summariezed ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30830

6. Measured cross sections and ion energies for a CHF^d^3 discharge.
Published: 8/1/2002
Authors: B. Peko, R. Champion, MVVS. Rao, James K Olthoff
Abstract: Trifluoromenthane (CHF^d^3) is used in semiconductor plasma processing chambers to achieve high etch selectivity of an oxide layer over a silicon substrate. Such surface etching is governed by the ion and molecule fluxes near the surface, the concent ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9195

7. Electricity Division Programs, Activities, and Accomplishments 2001
Series: NIST Interagency/Internal Report (NISTIR)
Published: 1/30/2002
Authors: James K Olthoff, Barry A. Bell
Abstract: A review of the Technical Accomplishments in the Electricity Division.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20627

8. Electron Interactions with c-C4F8
Published: 7/1/2001
Authors: Loucas G. Christophorou, James K Olthoff
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15944

9. Electron, Transport, Ionization and Attachment Coefficients in C2F4 and C2F4/Ar Mixtures
Published: 7/1/2001
Authors: Amanda N Goyettes, G. de Hann, Yicheng Wang, Loucas G. Christophorou, James K Olthoff
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25327

10. Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6
Published: 7/1/2001
Authors: Amanda N Goyettes, Yicheng Wang, James K Olthoff
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=24749



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