NIST logo

Publications Portal

You searched on: Author: robert vest Sorted by: title

Displaying records 21 to 30 of 68 records.
Resort by: Date / Title


21. Extreme-Ultraviolet Metrology at SURF III,
Published: 1/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101762

22. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101634

23. Facility for Pulsed Extreme Ultraviolet Detector Calibration
Published: 10/8/2003
Authors: Steven E Grantham, Robert Edward Vest, Charles S Tarrio, Thomas B Lucatorto
Abstract: All of the Extreme Ultraviolet light sources currently under consideration for Extreme Ultraviolet lithography are based on plasmas that emit radiation with a wavelength of approximately 13.4 nm. These sources whether they are produced by a discharg ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841761

24. Far-ultraviolet signatures of the 3He(n,tp) reaction in noble gas mixtures
Published: 12/8/2010
Authors: Patrick Hughes, Alan K Thompson, Michael Coplan, Robert Edward Vest, Charles W Clark
Abstract: Previous work showed that the 3He(n,tp) reaction in a cell of 3He at atmospheric pressure generated tens of far-ultraviolet photons per reacted neutron. Here we report amplification of that signal by factors of 1000 and more when noble gases are adde ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906674

25. First Report on Quantum Dot Coated CMOS CID Arrays for the UV and VUV
Published: 12/13/2013
Authors: Uwe Arp, Robert Edward Vest, Zoran Ninkov, Ross Robinson, Suraj Bhaskaran
Abstract: A technique has been developed for coating commercial off the shelf (COTS) detector arrays with a thin, uniform layer of quantum dots. The quantum deposition is accomplished using an Optomec Aerosol Jet rapid prototyping system. When illuminated by U ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914748

26. First Solar EUV Irradiances Obtained from SOHO by the SEM,
Published: 1/1/1998
Authors: D L Judge, D R McMullin, H S Ogawa, D Hovestadt, B Klecker, M Hilchenbach, E M{omlat}bius, L R Canfield, Robert Edward Vest, R N. Watts, Charles S Tarrio, M K{umlat}hne
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101579

27. Forty Years of Metrology with Synchrtron Radiation at SURF
Published: 1/1/2003
Authors: Uwe Arp, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward W Hagley, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100995

28. Forty years of metrology with synchrotron radiation at SURF
Published: 1/1/2003
Authors: Uwe Arp, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward W Hagley, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100997

29. IR-enhanced Si reference detectors for 1-step scale transfers from 300 nm to 1000 nm
Published: 11/20/2014
Authors: George P Eppeldauer, Thomas C Larason, Jeanne M Houston, Robert Edward Vest, Uwe Arp, Howard W Yoon
Abstract: IR-enhanced Si photodiodes have improved radiometric and electronic characteristics as compared to other widely used Si photodiodes and can be used as responsivity standards in the wavelength range from 300 nm to 1000 nm. Their low predicted uncerta ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916505

30. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840173



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series