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Author: robert vest
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Displaying records 31 to 40 of 65 records.
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31. Response of a Silicon Photodiode to Pulsed Radiation
Published: 9/1/2003
Authors: Robert Edward Vest, Steven E Grantham
Abstract: Both the integrated-charge and peak-voltage responsivity of a 1 cm2 Si photodiode optimized for the extreme ultraviolet have been measured with 532 nm wavelength pulsed radiation. The peak power of the optical pulse is varied from 35 mW to 24 kW wit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840152

32. Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
Series: Journal of Research (NIST JRES)
Published: 7/1/2003
Authors: Charles S Tarrio, S Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
Abstract: Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841623

33. Present Status of Radiometric Quality Silicon Photodiodes
Published: 2/1/2003
Authors: R Korde, C Prince, N. Cunningham, Robert Edward Vest, E Gullikson
Abstract: Evaluation of five types of silicon photodiodes was undertaken to verify their suitability for absolute radiometry and also for their use as transfer standards in the spectral region from 1 nm to 1100 nm. Four types of photodiodes were fabricated for ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840128

34. Quantum Efficiency of Solar-Blind Semiconductor Photodiodes in the Far Ultraviolet
Published: 2/1/2003
Authors: Robert Edward Vest, B Hertog, P Chow
Abstract: A difficulty in diverse metrological applications is the measurement of relatively low intensity ultraviolet radiation in the presence of an intense visible radiation background. The development of a detector technology that combines the high efficie ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840129

35. Forty Years of Metrology with Synchrtron Radiation at SURF
Published: 1/1/2003
Authors: Uwe Arp, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward Walter Hagley, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100995

36. Forty years of metrology with synchrotron radiation at SURF
Published: 1/1/2003
Authors: Uwe Arp, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward Walter Hagley, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100997

37. Present status of radiometric quality silicon photodiodes,
Published: 1/1/2003
Authors: R Korde, C Prince, D Cunningham, Robert Edward Vest, E Gullikson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101588

38. Quantum efficiency of solar-blind semiconductor photodiodes in the far ultraviolet,
Published: 1/1/2003
Authors: Robert Edward Vest, B Hertog, P P Chow
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101787

39. Response of a silicon photodiode to pulsed radiation,
Published: 1/1/2003
Authors: Robert Edward Vest, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101786

40. Towards high accuracy reflectometry for extreme-ultraviolet lithography,
Published: 1/1/2003
Authors: Charles S Tarrio, Steven E Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101861



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