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Author: robert vest
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Displaying records 21 to 30 of 65 records.
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21. A simple transfer-optics system for an extreme-ultraviolet synchrotron beamline,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101759

22. XUV Photometer System (XPS): Overview and Calibrations,
Published: 1/1/2005
Authors: T N Woods, G Rottman, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101803

23. External efficiency of Pt/n-GaN Schottky diodes in the spectral range 5-500 nm
Published: 11/11/2004
Authors: S Aslam, Robert Edward Vest, D Franz, F Yan, Y Zhao, D B Mott
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101401

24. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840173

25. Large Area Pt/n-GaN Schottky Photodiodes With Extremely Low Leakage Current
Published: 8/19/2004
Authors: A Shahid, Robert Edward Vest, D Franz, F Yan, Y Zhao, D B Mott
Abstract: Pt/n-type GaN Schottky photodiodes with very large active areas (0.25 cm^u2^d and 1 cm^u2^d) which exhibit extremely low leakage currents at low reverse bias are reported. The Schottky photodiodes were fabricated from n-/n+ epitaxial layers grown by ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840178

26. Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings
Published: 7/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
Abstract: We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm^u-1^ and the other 2500 mm^u-1^. Measurements were made to provide absolute transmission efficiency ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840108

27. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101634

28. Large area GaN Schottky photodiode with low leakage current
Published: 1/1/2004
Authors: S Aslam, Robert Edward Vest, D Franz, F Yan, Y Zhao
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101427

29. Facility for Pulsed Extreme Ultraviolet Detector Calibration
Published: 10/8/2003
Authors: Steven E Grantham, Robert Edward Vest, Charles S Tarrio, Thomas B Lucatorto
Abstract: All of the Extreme Ultraviolet light sources currently under consideration for Extreme Ultraviolet lithography are based on plasmas that emit radiation with a wavelength of approximately 13.4 nm. These sources whether they are produced by a discharg ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841761

30. 40 Years of Metrology With Synchrotron Radiation at SURF
Published: 9/1/2003
Authors: Uwe Arp, Steven E Grantham, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
Abstract: the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840164



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