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Author: robert vest
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Displaying records 11 to 20 of 66 records.
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11. Quantitative Measurement of Outgas Products From EUV Photoresists
Published: 3/14/2008
Authors: Charles S Tarrio, Bruce A Benner Jr, Robert Edward Vest, Steven E Grantham, Shannon Bradley Hill, Thomas B Lucatorto, Jay H Hendricks, Patrick J Abbott, Greg Denbeaux, Alin Antohe, Chimaobi Mbanaso, Kevin Orbek
Abstract: The photon-stimulated emission of organic molecules from the photoresist during exposure is a serious problem for extreme- ultraviolet lithography (EUVL) because the adsorption of the outgassing products on the EUV optics can lead to carbonization an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842436

12. SDO EVE CCD and Thin Foil Filter Characterization and Selection
Published: 9/13/2007
Authors: Matthew Triplett, David Croster, Thomas N Woods, Francis Eparvier, Phillip Chamberlin, Gregory D Berthiaume, David Weitz, Robert Edward Vest
Abstract: The NASA Solar Dynamics Observatory (SDO), scheduled for launch in 2008, incorporates a suite of instruments including the EUV Variability Experiment (EVE). The EVE instrument package contains grating spectrographs used to measure the solar extreme u ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840284

13. SDO EVE ESP Radiometric Calibration and Results
Published: 9/13/2007
Authors: Leonid Didkovsky, D L Judge, Seth Wieman, T N Woods, Phillip Chamberlin, Andrew Jones, Francis Eparvier, Matthew Triplett, Don Woodraska, D R McMullin, Mitchell L. Furst, Robert Edward Vest
Abstract: The Solar Dynamics Observatory (SDO) Extreme ultraviolet Solar Photometer (ESP), as a part of the Extreme ultraviolet Variability Experiment (EVE) suite of instruments, was calibrated at the National Institute of Standards and Technology (NIST) on th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840270

14. Metrology for EUV Lithography Sources and Tools
Published: 7/3/2006
Authors: Steven E Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840201

15. Metrology for EUVL Sources and Tools,ed. by V. Bakshi
Published: 1/1/2006
Authors: S Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100158

16. NIST VUV Metrology Programs to Support Space Based Research,
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101784

17. NIST VUV metrology programs to support space-based research
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104243

18. Saturation effects in solid state photodiodes and impact on EUVL pulse energy measurements,
Published: 1/1/2006
Authors: Robert Edward Vest, Shannon Bradley Hill, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101785

19. EUV component and system characterization at NIST for the support of extreme-ultraviolet lithography, ed. by R.S. Mackay
Published: 5/13/2005
Authors: S Grantham, Shannon Bradley Hill, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100159

20. A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline
Published: 4/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
Abstract: Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840198



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