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Displaying records 11 to 20 of 68 records.
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11. Measuring Pulse Energy With Solid-State Photodiodes
Published: 4/10/2009
Authors: Robert Edward Vest, Shannon Bradley Hill, Steven E Grantham
Abstract: With the advent of extreme ultraviolet lithography (EUVL) the measurement of the energy contained in pulses of short-wavelength radiation is becoming increasingly important. Even low average power sources can deliver pulses of radiation with high pea ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840222

12. EUVL dosimetry at NIST
Published: 3/13/2009
Authors: Charles S Tarrio, Steven E Grantham, Marc J Cangemi, Robert Edward Vest, Thomas B Lucatorto, Noreen Harned
Abstract: As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. Recently, we undertook a major effort in accurately measuring the sensitivity of three ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901663

13. Quantitative Measurement of Outgas Products From EUV Photoresists
Published: 3/14/2008
Authors: Charles S Tarrio, Bruce A Benner Jr, Robert Edward Vest, Steven E Grantham, Shannon Bradley Hill, Thomas B Lucatorto, Jay H Hendricks, Patrick J Abbott, Greg Denbeaux, Alin Antohe, Chimaobi Mbanaso, Kevin Orbek
Abstract: The photon-stimulated emission of organic molecules from the photoresist during exposure is a serious problem for extreme- ultraviolet lithography (EUVL) because the adsorption of the outgassing products on the EUV optics can lead to carbonization an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842436

14. SDO EVE CCD and Thin Foil Filter Characterization and Selection
Published: 9/13/2007
Authors: Matthew Triplett, David Croster, Thomas N Woods, Francis Eparvier, Phillip Chamberlin, Gregory D Berthiaume, David Weitz, Robert Edward Vest
Abstract: The NASA Solar Dynamics Observatory (SDO), scheduled for launch in 2008, incorporates a suite of instruments including the EUV Variability Experiment (EVE). The EVE instrument package contains grating spectrographs used to measure the solar extreme u ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840284

15. SDO EVE ESP Radiometric Calibration and Results
Published: 9/13/2007
Authors: Leonid Didkovsky, D L Judge, Seth Wieman, T N Woods, Phillip Chamberlin, Andrew Jones, Francis Eparvier, Matthew Triplett, Don Woodraska, D R McMullin, Mitchell L. Furst, Robert Edward Vest
Abstract: The Solar Dynamics Observatory (SDO) Extreme ultraviolet Solar Photometer (ESP), as a part of the Extreme ultraviolet Variability Experiment (EVE) suite of instruments, was calibrated at the National Institute of Standards and Technology (NIST) on th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840270

16. Metrology for EUV Lithography Sources and Tools
Published: 7/3/2006
Authors: Steven E Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840201

17. Metrology for EUVL Sources and Tools,ed. by V. Bakshi
Published: 1/1/2006
Authors: S Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100158

18. NIST VUV Metrology Programs to Support Space Based Research,
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101784

19. NIST VUV metrology programs to support space-based research
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104243

20. Saturation effects in solid state photodiodes and impact on EUVL pulse energy measurements,
Published: 1/1/2006
Authors: Robert Edward Vest, Shannon Bradley Hill, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101785



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