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Author: charles tarrio
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Displaying records 91 to 100 of 102 records.
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91. Towards high accuracy reflectometry for extreme-ultraviolet lithography,
Published: 1/1/2003
Authors: Charles S Tarrio, Steven E Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101861

92. Tracking down sources of carbon contamination in EUVL exposure tools
Published: 8/3/2009
Authors: Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto, R. Caudillo
Abstract: Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901665

93. Transmission grating based EUV imaging spectrometer for time and space resolved impurity measurements
Published: 10/31/2010
Authors: Charles S Tarrio, Steven E Grantham, D Kumar, D Stutman, K Tritz, M Finkenthal, NSTX Team N/A
Abstract: A free standing transmission grating based imaging spectrometer in the extreme ultraviolet (EUV)range has been developed for the National Spherical Torus Experiment (NSTX). The spectrometer operates in a survey mode covering the approximate spectral ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905975

94. Trends in the X-Ray Diffraction of Multilayers, in Physics of X-Ray Multilayer Structures
Published: 1/1/1994
Authors: Charles S Tarrio, R Deslattes, Ariel Caticha, J Pedulla
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=102920

95. Ultrahigh-Resolution Photographic Films for X-Ray/EUV/FUV Astronomy, ed. by R.B. Hoover and A.B.C. Walker Jr.
Published: 1/1/1992
Authors: Richard Brice Hoover, A B Walker, C E Deforest, R N. Watts, Charles S Tarrio
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100164

96. Upgrades to the NIST/DARPA EUV Reflectometry Facility
Published: 12/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto, S Grantham, M B Squires, Uwe Arp, Lu Deng
Abstract: We have recently installed a new sample chamber at the NIST/DARPA EUV Reflectometry Facility at the National Institute of Standards and Technology. The chamber replaces a much smaller system on Beamline 7 at the Synchrotron Ultraviolet Radiation Fac ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841579

97. Variable Groove Spaced Grating Monochromators for Synchrotron Light Sources,
Published: 8/24/1994
Authors: M Haass, J J Jia, T A Callcott, D L Ederer, K E Miyano, R N. Watts, D R Mueller, Charles S Tarrio, E Morikawa
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100162

98. Variable Groove Spaced Grating Monochromators for Synchrotron Light Sources,
Published: 1/1/1994
Authors: M Haass, J -J Jia, T A Callcott, D L Ederer, K E Miyano, R N. Watts, D R Mueller, Charles S Tarrio, E Morikawa
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101820

99. XUV Optics Characterization at NIST
Published: 1/1/1993
Authors: R N. Watts, Charles S Tarrio, Thomas B Lucatorto, R P. Madden, R Deslattes, Estler W Caticha, C J Evans, T Mcwaid, Jing Fu, T V Vorburger
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=102589

100. XUV Optics Characterization at NIST,
Published: 1/1/1992
Authors: R N. Watts, Charles S Tarrio, Thomas B Lucatorto, R P. Madden, R Deslattes, Ariel Caticha, A Henins
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100210



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