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Displaying records 91 to 100 of 104 records.
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91. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

92. Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
Series: Journal of Research (NIST JRES)
Published: 7/1/2003
Authors: Charles S Tarrio, S Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
Abstract: Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841623

93. Towards high accuracy reflectometry for extreme-ultraviolet lithography,
Published: 1/1/2003
Authors: Charles S Tarrio, Steven E Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101861

94. Tracking down sources of carbon contamination in EUVL exposure tools
Published: 8/3/2009
Authors: Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto, R. Caudillo
Abstract: Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901665

95. Transmission grating based EUV imaging spectrometer for time and space resolved impurity measurements
Published: 10/31/2010
Authors: Charles S Tarrio, Steven E Grantham, D Kumar, D Stutman, K Tritz, M Finkenthal, NSTX Team N/A
Abstract: A free standing transmission grating based imaging spectrometer in the extreme ultraviolet (EUV)range has been developed for the National Spherical Torus Experiment (NSTX). The spectrometer operates in a survey mode covering the approximate spectral ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905975

96. Trends in the X-Ray Diffraction of Multilayers, in Physics of X-Ray Multilayer Structures
Published: 1/1/1994
Authors: Charles S Tarrio, R Deslattes, Ariel Caticha, J Pedulla
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=102920

97. Ultrahigh-Resolution Photographic Films for X-Ray/EUV/FUV Astronomy, ed. by R.B. Hoover and A.B.C. Walker Jr.
Published: 1/1/1992
Authors: Richard Brice Hoover, A B Walker, C E Deforest, R N. Watts, Charles S Tarrio
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100164

98. Upgrades to the NIST/DARPA EUV Reflectometry Facility
Published: 12/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto, S Grantham, M B Squires, Uwe Arp, Lu Deng
Abstract: We have recently installed a new sample chamber at the NIST/DARPA EUV Reflectometry Facility at the National Institute of Standards and Technology. The chamber replaces a much smaller system on Beamline 7 at the Synchrotron Ultraviolet Radiation Fac ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841579

99. Variable Groove Spaced Grating Monochromators for Synchrotron Light Sources,
Published: 8/24/1994
Authors: M Haass, J J Jia, T A Callcott, D L Ederer, K E Miyano, R N. Watts, D R Mueller, Charles S Tarrio, E Morikawa
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100162

100. Variable Groove Spaced Grating Monochromators for Synchrotron Light Sources,
Published: 1/1/1994
Authors: M Haass, J -J Jia, T A Callcott, D L Ederer, K E Miyano, R N. Watts, D R Mueller, Charles S Tarrio, E Morikawa
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101820



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