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Author: david seiler
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1. The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
Published: 3/27/2013
Authors: Janet M Cassard, Jon C Geist, Craig Dyer McGray, Richard A Allen, Muhammad Yaqub Afridi, Brian Joseph Nablo, Michael Gaitan, David G Seiler
Abstract: This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912229

2. Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Published: 3/26/2013
Authors: Erik M Secula, David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913713

3. User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
Series: Special Publication (NIST SP)
Report Number: 260-177
Published: 2/15/2013
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, Michael Gaitan, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910746

4. The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published: 3/21/2012
Authors: Janet M Cassard, Jon C Geist, Michael Gaitan, David G Seiler
Abstract: The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910317

5. Frontiers of Characterization and Metrology for Nanoelectronics: 2011
Published: 12/28/2011
Authors: David G Seiler, Alain C. Diebold, Robert McDonald, Amal Chabli, Erik M Secula
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910545

6. User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition
Series: Special Publication (NIST SP)
Report Number: 260-179
Published: 9/6/2011
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a standard reference device sold as a NIST Standard Reference Material (SRM) that contains MEMS test structures on a test chip. The two SRM chips (2494 and 2495) provide for both dimensional an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909186

7. Physics Careers in Government Agencies
Published: 3/14/2010
Author: David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905142

8. Optical Properties of Semiconductors
Published: 10/19/2009
Authors: David G Seiler, Stefan Zollner, Alain C. Diebold, Paul Amirtharaj
Abstract: Rapid advances in semiconductor manufacturing and associated technologies have increased the need for optical characterization techniques for materials analysis and in-situ monitoring/control applications. Optical measurements have many unique and at ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=33124

9. Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Published: 10/5/2009
Authors: David G Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M Secula
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904357

10. Metrology, Nanocharacterization and Instrumentation for Emerging Nanotechnology and Nanoelectronics: Electrical and Optical Characterization
Published: 12/9/2007
Author: David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32866