NIST logo

Publications Portal

You searched on:
Author: thomas lucatorto

Displaying records 31 to 40 of 108 records.
Resort by: Date / Title


31. Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology
Published: 1/1/2002
Authors: Steven E Grantham, Charles S Tarrio, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101547

32. Characterization of the response of chromium-doped alumina screens in the vacuum ultraviolet using synchrotron radiation,
Published: 1/1/2002
Authors: James K McCarthy, A Baciero, B Zurro, Uwe Arp, Charles S Tarrio, Thomas B Lucatorto, A Morono, P Martin, E R Hodgson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101617

33. Studies of intensity noise at SURF III
Published: 1/1/2002
Authors: Uwe Arp, Thomas B Lucatorto, K Harkay, Kyoungsik Kim
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101047

34. Upgrades to the NIST/DARPA EUV Reflectometry Facility
Published: 12/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto, S Grantham, M B Squires, Uwe Arp, Lu Deng
Abstract: We have recently installed a new sample chamber at the NIST/DARPA EUV Reflectometry Facility at the National Institute of Standards and Technology. The chamber replaces a much smaller system on Beamline 7 at the Synchrotron Ultraviolet Radiation Fac ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841579

35. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

36. Elimation of Intensity Noise at SURF III
Published: 8/1/2001
Authors: Uwe Arp, K Harkay, K Kim, Thomas B Lucatorto
Abstract: Most applications of synchrotron radiation are not very sensitive to source intensity fluctuations. Fourier-transform spectroscopy, however, is very sensitive to intensity noise with frequencies of few Hz to several kHz. An infrared spectrometer in ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841535

37. Accurate Pattern Registration for Integrated Circuit Tomography
Published: 7/1/2001
Authors: Zachary H Levine, S Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Y Wang, Thomas B Lucatorto
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840063

38. Evaluating Optical Materials
Published: 5/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto
Abstract: curately quantifying optical constants is key to fabricating successful multiplayer film components
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840104

39. Evaluating optical materials,
Published: 5/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100202

40. Spontaneous Coherent Microwave Emission and the Sawtooth Instability in a Compact Storage Ring
Published: 5/1/2001
Authors: Uwe Arp, Gerald T Fraser, Angela R Hight Walker, Thomas B Lucatorto, K K Lehmann, K Harkay, N Sereno, K Kim
Abstract: Strong evidence for self-excited emission of coherent synchrotron radiation in the microwave spectral region was observed at the Synchrotron Ultraviolet Radiation Facility SURF III electron storage ring at the National Institute of Standards and Tech ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840285



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series