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Author: quandou wang
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1. Holographic Radius Test Plates
Published: 9/7/2013
Authors: Quandou Wang, Johannes A Soons, Ulf Griesmann
Abstract: We evaluate a method for testing the radius of spheres with a hologram that consists of a pair of nested Fresnel zone lenses. The hologram is positioned in the collimated test beam of a Fizeau interferometer. The inner zone lens generates a focus at ...

2. A modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
Published: 8/17/2012
Authors: Jungjae Park, Lingfeng Chen, Quandou Wang, Ulf Griesmann
Abstract: We describe a method to simultaneously measure thickness variation and refractive index homogeneity of 300 mm diameter silicon wafers using a wavelength shifting Fizeau interferometer operating at 1550 nm. Only three measurements are required, corres ...

3. Plasma Etching Uniformity Control for Making Large and Thick Dual-Focus Zone Plates
Published: 8/1/2011
Authors: Lei Chen, Quandou Wang, Ulf Griesmann
Abstract: A typical zone plate structure is composed of concentric rings with a radially decreasing feature size such that the path of light through every second zone to the focus differs by one optical wavelength. In order to achieve the highest possible diff ...

4. Binary amplitude holograms made from dyed photoresist
Published: 5/13/2011
Authors: Quandou Wang, Ulf Griesmann, John H Burnett
Abstract: A method for fabricating binary amplitude holograms from a dyed photoresist is described. It is of particular interest for holograms that are used as null lenses in the form metrology of aspheric surfaces and wavefronts. A pigment that stron ...

5. Plasma Etching Uniformity Control for Making Large and Thick Dual-Focus Zone Plates
Published: 1/11/2011
Authors: Lei Chen, Quandou Wang, Ulf Griesmann
Abstract: In summary, an optimized plasma etching process has been developed and a Teflon ring has been made to minimize the feature size variation effect and eliminate the thick glass edge effect. Large phase type dual-focus zone plate with good etching profi ...

6. Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency
Published: 9/1/2010
Authors: JiYoung Chu, Quandou Wang, John Lehan, Ulf Griesmann
Abstract: In the performance evaluation of phase-shifting interferometers for figure metrology, the height response, or height transfer function, is rarely taken into consideration, because in most applications smooth surfaces are measured and only the lowest ...

7. Flatness measurements of thin, plane-parallel optics floated on a heavy liquid
Published: 6/23/2010
Authors: Ulf Griesmann, Quandou Wang, Eric C Benck, Jiyoung Chu, Jaewoong Sohn
Abstract: no abstract

8. A Simple Method to Improve Etching Uniformity when Making Phase Type CGHs on a Thick Glass Substrate
Published: 6/13/2010
Author: Quandou Wang
Abstract: A simple method to optimize the etching uniformity when making a Computer generated halogram on a thick optical glass substrate is described, which uses a Teflon ring to enclose the substrate during reactive-ion etching (RIE).

9. Deformation-Free Form Error Measurements of Thin, Plane-Parallel Optics Floated on a Heavy Liquid
Published: 4/1/2010
Authors: JiYoung Chu, Ulf Griesmann, Quandou Wang, Johannes A Soons, Eric C Benck
Abstract: We describe a novel method for measuring the unconstrained flatness error of thin, plane parallel precision optics by floating them on high-density aqueous metatungstate solutions while measuring the flatness error with an interferometer. The supp ...

10. Radius Measurement of Spherical Surfaces With Large Radii-of-Curvature Using Dual-Focus Zone Plates
Published: 10/20/2008
Authors: Quandou Wang, Guangjun Gao, Ulf Griesmann
Abstract: The measurement of spherical surface radii exceeding a few meters presents a challenge, because the familiar radius-bench method requires large part displacements. Dual-focus zone plates can extend the radius-bench method to measurements of large rad ...

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