NIST logo

Publications Portal

You searched on: Author: benjamin tsai

Displaying records 11 to 20 of 98 records.
Resort by: Date / Title

11. Traceable Temperature Calibrations of Radiation Thermometers for Rapid Thermal Processing
Published: 11/1/2005
Author: Benjamin K Tsai
Abstract: Lightpipe radiation thermometers (LPRTs) have been successfully calibrated at NIST for rapid thermal processing (RTP) applications using a sodium heat-pipe blackbody (Na-HPBB) between 700 C and 900 C with an uncertainty of about 0.3 C (k = 1) trac ...

12. Calibration of a Low Temperature Cable-Less Lightpipe Pyrometer on the NIST Post-Exposure Bake Test Bed
Published: 10/5/2005
Authors: Benjamin K Tsai, Kenneth Gruber Kreider, William Andrew Kimes
Abstract: The advent of the cable-less lightpipe radiation thermometer (CLRT) has resulted in a significant improvement in the accuracy of lightpipe radiation thermometer calibrations and measurements. CLRT systems show great promise in noncontact measurement ...

13. Infrared Emittance Measurements at NIST
Published: 10/5/2005
Authors: Leonard M Hanssen, Benjamin K Tsai, Sergey Mekhontsev
Abstract: A new capability for the measurement of the temperature-dependent emittance of specular samples in the near infrared spectral region has been developed in NIST s Infrared Spectrophotometry Laboratory to provide emittance measurements and standards fo ...

14. Emittance standards for improved radiation thermometry during thermal processing of silicon materials, ed. by D. Zvizdic
Published: 1/1/2005
Authors: Benjamin K Tsai, D P DeWitt, E A. Early, Leonard M Hanssen, Sergey Mekhontsev, Matthias Rink, K G Kreider, B J Lee, Z M Zhang

15. Modeling Radiative Properties of Silicon with Coatings and Comparison with Reflectance Measurements
Published: 1/1/2005
Authors: D P DeWitt, E A. Early, B J Lee, Benjamin K Tsai, Z M Zhang

16. In Situ Calibration of Lightpipe Radiometers in Rapid Thermal Processing Between 300 C to 700 C
Published: 9/15/2004
Authors: William Andrew Kimes, Kenneth Gruber Kreider, Dean C Ripple, Benjamin K Tsai
Abstract: Many Rapid Thermal Processing (RTP) tools are currently monitored and controlled with lightpipe radiometers (LPRTs), which have been limited to measuring temperatures above 500 C because of the low signal level below 500 C. New commercial LPRTs co ...

17. Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published: 9/1/2004
Authors: Benjamin K Tsai, J Bodycomb, D P DeWitt, Kenneth Gruber Kreider, William Andrew Kimes

18. Comparison of an Oil-Bath Blackbody to a Water-Bath Blackbody Using the NIST TXR
Published: 6/22/2004
Authors: Benjamin K Tsai, Joseph Paul Rice

19. Emittance Standards for Improved Radiation Thermometry During Thermal Processing of Silicon Materials
Published: 6/22/2004
Authors: Benjamin K Tsai, D P DeWitt, E A. Early, Leonard M Hanssen, Sergey Mekhontsev, Matthias Rink, Kenneth Gruber Kreider, B J Lee, Zhuomin Zhang

20. NIST Measurement Services: Heat Flux Sensor Calibration
Series: Special Publication (NIST SP)
Published: 5/31/2004
Authors: Benjamin K Tsai, Charles E Gibson, S. E. Nagler, D P DeWitt, Robert D. Saunders

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series