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Author: charles tarrio

Displaying records 21 to 30 of 102 records.
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21. Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing
Published: 5/1/2005
Authors: Charles S Tarrio, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840203

22. A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline
Published: 4/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
Abstract: Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840198

23. A simple transfer-optics system for an extreme-ultraviolet synchrotron beamline,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101759

24. A synchrotron beamline for extreme-ultraviolet multilayer mirror testing,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101760

25. Optics go to extremes in EUV lithography
Published: 1/1/2005
Authors: Steven E Grantham, Charles S Tarrio, Shannon Bradley Hill, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101546

26. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840173

27. Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings
Published: 7/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
Abstract: We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm^u-1^ and the other 2500 mm^u-1^. Measurements were made to provide absolute transmission efficiency ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840108

28. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101634

29. Facility for Pulsed Extreme Ultraviolet Detector Calibration
Published: 10/8/2003
Authors: Steven E Grantham, Robert Edward Vest, Charles S Tarrio, Thomas B Lucatorto
Abstract: All of the Extreme Ultraviolet light sources currently under consideration for Extreme Ultraviolet lithography are based on plasmas that emit radiation with a wavelength of approximately 13.4 nm. These sources whether they are produced by a discharg ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841761

30. Design and Performance of Capping Layers for Extreme-Ulatraviolet Multilayer Mirrors
Published: 10/1/2003
Authors: S Bajt, H N Chapman, Nhan Nguyen, J Alameda, J C Robinson, M Malinowski, E Gullikson, Andrew Aquila, Charles S Tarrio, Steven E Grantham
Abstract: Multilayer lifetime has emerged as one of the major issues for the commercialization of extreme-ultraviolet lithography (EUVL). We describe the performance of an oxidation-resistant capping layer of Ru atop multilayers that results in a reflectivity ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840180



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