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Author: richard silver

Displaying records 101 to 110 of 114 records.
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101. High Accuracy Overlay Measurements
Published: 5/1/1996
Authors: Richard M Silver, James Edward Potzick, Fredric Scire, Robert D. Larrabee
Abstract: The reduced critical dimensions of semiconductor devices place more stringent requirements on the precision and accuracy of overlay metrology tools used to monitor stepper feature placement. The use of mix and match stepper techniques and step and sc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820817

102. Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts
Published: 1/1/1996
Authors: V W. Tsai, Theodore Vincent Vorburger, P Sullivan, Ronald G Dixson, Richard M Silver, Edwin Ross Williams, J Schneir
Abstract: The decreasing feature dimensions required in the semiconductor manufacturing industry are placing ever increasing demands upon metrology instruments. Atomic force microscopes (AFMs), which can have ~1 nm lateral resolution and sub-angstrom vertical ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820827

103. Optical Overlay Metrology at NIST
Published: 1/1/1996
Authors: Richard M Silver, Amy Singer, L Carroll, S Berg-cross, James Edward Potzick
Abstract: Many of the significant challenges in making accurate overlay registration measurements are discussed. An understanding of the causes of the errors affecting these measurements is a prerequisite to improving accuracy and also for the design of standa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820818

104. Delineation of pn Junctions by Scanning Tunneling Microscopy/Spectroscopy in Air and Ultra High Vacuum
Published: 6/1/1995
Authors: Richard M Silver, John A Dagata, W. F. Tseng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=29181

105. Delineation of pn Junctions by Scanning Tunneling Microscopy/Spectroscopy in Air and Ultrahigh Vacuum
Published: 5/1/1995
Authors: Richard M Silver, John A Dagata, H. W. Tseng
Abstract: Lateral dopant profiling of cleaved, passivated abrupt GaAs pn junctions using scanning tunneling microscopy/spectroscopy is demonstrated both in ultrahigh vacuum and air. A combination of forward-and reverse-bias imaging and position-dependent tunn ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820764

106. Metrology with the Ultraviolet Scanning Transmission Microscope
Published: 5/1/1995
Authors: Richard M Silver, James Edward Potzick, Y Hu
Abstract: A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been implemented. This new design shows improved vibration characteristics and is able to accommod ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820765

107. Overlay Measurements and Standards
Published: 5/1/1995
Authors: Richard M Silver, James Edward Potzick, Robert D. Larrabee
Abstract: The relative misalignment of features produced by different mask levels (i.e., overlay error) is projected to become an increasingly important problem to the semiconductor industry as the size of the critical features continues to decrease. In respon ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820766

108. Air and Vacuum STM/S of Bulk-Doped GaAs and pn Junctions
Series: NIST Interagency/Internal Report (NISTIR)
Published: 12/1/1994
Authors: Richard M Silver, John A Dagata, W. F. Tseng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20047

109. Ambient and Vacuum Scanning Tunneling Spectroscopy of Sulfur and Oxygen-Terminated Gallium Arsenide
Published: 11/1/1994
Authors: Richard M Silver, John A Dagata, H. W. Tseng
Abstract: Tunneling spectroscopy of sulfur- and oxygen-terminated n- and p-type GaAs (110) surfaces is reported for air and ultrahigh-vacuum conditions. Simulations of the complete I-V characteristics with explicit inclusion of surface states within the planar ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820713

110. Ambient and Vacuum Scanning Tunneling Spectroscopy of Sulfur- and Oxygen-Terminated Gallium Arsenide
Published: 11/1/1994
Authors: Richard M Silver, John A Dagata, W. F. Tseng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25904



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