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Author: gregory scace

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11. Uncertainty of the NIST Low Frost-Point Humidity Generator
Published: 6/1/2001
Authors: Gregory E Scace, Joseph Terence Hodges
Abstract: The NIST Low Frost-point Humidity Generator (LFPG) produces water vapor gas mixtures with mole fractions from approximately 5 nmol/mol to 4 mmol/mol for research, calibration of transfer standards, and testing and development of new humidity instrum ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830748

12. Wavelength-Modulation Laser Hygrometer for Ultrasensitive Detection of Water Vapor in Semiconductor Gases
Published: 2/1/2001
Authors: D C Hovde, Joseph Terence Hodges, Gregory E Scace, J A Silver
Abstract: The ability to quantify trace amounts of water vapor in semiconductor process gases is critical to quality control plasma etching and other semiconductorfabrication techniques. This paper demonstrates a first-principles method for the measurement of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830613

13. Performance of a Precision Low Frost-Point Humidity Generator
Published: 2/12/1998
Authors: Gregory E Scace, D C Hovde, Joseph Terence Hodges, Peter H Huang, J A Silver, James R Whetstone
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901719

14. The New NIST Low Frost-Point Humidity Generator
Published: 12/1/1997
Authors: Gregory E Scace, P H Huang, Joseph Terence Hodges, Douglas A Olson, James R Whetstone
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100319

15. Calibration of Water Permeation Tubes
Series: Special Publication (NIST SP)
Report Number: 250-82
Published: Date unknown
Authors: Gregory E Scace, W Wyatt Miller
Abstract: NIST provides traceability of permeation tube humidity generators to national humidity standards by measuring the water permeation rate of permeation tubes submitted for calibration. Permeation tubes undergoing calibration are installed into a speci ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831014

16. Developing advanced humidity standards to measure trace water vapor in specialty gases
Published: 1/1/0006
Authors: Joseph Terence Hodges, Gregory E Scace
Abstract: We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830904