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11. A Reference Standard for Measuring Humidity of Air Using a Re-entrant Radio Frequency Resonator
Published: 5/2/2006
Authors: Peter H. Huang, Dean C Ripple, Michael R Moldover, Gregory E Scace
Abstract: We developed a stable reference hygrometer suitable for operation at temperatures above ambient that has a robust design, inherent stability, and a well-understood theory of measurement. This hygrometer uses a reentrant, radio-frequency, cavity reson ...

12. Developing advanced humidity standards to measure trace water vapor in specialty gases
Published: 1/1/2006
Authors: Joseph Terence Hodges, Gregory E Scace
Abstract: We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the m ...

13. Frequency-Stabilized Single-Mode Cavity Ring-Down Apparatus for High-Resolution Absorption Spectroscopy
Published: 4/1/2004
Authors: Joseph Terence Hodges, Howard P. Layer, W Wyatt Miller, Gregory E Scace
Abstract: We present a new cavity ring-down spectroscopy (CRDS) apparatus suitable for high-resolution absorption spectroscopy. The central feature of the spectrometer is a ring-down cavity whose comb of eigenfrequencies is actively stabilized with respect to ...

14. Calibrating Water Permeation Tubes Using Saturator-Based Primary Trace Humidity Standards
Published: 5/1/2003
Authors: Gregory E Scace, Joseph Terence Hodges
Abstract: H^d2^O-containing permeation tubes are a key component of permeation tube humidity generators (PTGs). These devices are widely used for calibrating atmospheric pressure ionization mass spectrometers (APIMS) and for calibrating other trace humidity a ...

15. Referencing Dilution-Based Trace Humidity Generators to Primary Humidity Standards
Published: 6/1/2001
Authors: Peter H. Huang, Gregory E Scace, Joseph Terence Hodges
Abstract: We describe a technique for measuring the trace humidity level delivered by a permeationtube type moisture generator (PTMG). Amount fractions in the range 10 nmol/mol to 100 nmol/mol of H2O in N2 carrier gas were considered. The measurements are re ...

16. Uncertainty of the NIST Low Frost-Point Humidity Generator
Published: 6/1/2001
Authors: Gregory E Scace, Joseph Terence Hodges
Abstract: The NIST Low Frost-point Humidity Generator (LFPG) produces water vapor gas mixtures with mole fractions from approximately 5 nmol/mol to 4 mmol/mol for research, calibration of transfer standards, and testing and development of new humidity instrum ...

17. Wavelength-Modulation Laser Hygrometer for Ultrasensitive Detection of Water Vapor in Semiconductor Gases
Published: 2/1/2001
Authors: D C Hovde, Joseph Terence Hodges, Gregory E Scace, J A Silver
Abstract: The ability to quantify trace amounts of water vapor in semiconductor process gases is critical to quality control plasma etching and other semiconductorfabrication techniques. This paper demonstrates a first-principles method for the measurement of ...

18. Performance of a Precision Low Frost-Point Humidity Generator
Published: 2/12/1998
Authors: Gregory E Scace, D C Hovde, Joseph Terence Hodges, Peter H. Huang, J A Silver, James R Whetstone

19. The New NIST Low Frost-Point Humidity Generator
Published: 12/1/1997
Authors: Gregory E Scace, P H Huang, Joseph Terence Hodges, Douglas A Olson, James R Whetstone

20. Calibration of Water Permeation Tubes
Series: Special Publication (NIST SP)
Report Number: 250-82
Published: Date unknown
Authors: Gregory E Scace, W Wyatt Miller
Abstract: NIST provides traceability of permeation tube humidity generators to national humidity standards by measuring the water permeation rate of permeation tubes submitted for calibration. Permeation tubes undergoing calibration are installed into a speci ...

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