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Author: thomas renegar

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31. Tip Characterization for Scanned Probe Microscope Width Metrology
Published: 3/1/1998
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823092

32. Stylus-Laser Surface Calibration System
Published: 10/1/1996
Authors: Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric P Whitenton, M Croarkin
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820830



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