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Author: thomas renegar
Displaying records 31 to 32.
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31. Tip Characterization for Scanned Probe Microscope Width Metrology
Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
32. Stylus-Laser Surface Calibration System
Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric P Whitenton, M Croarkin
A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...