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Author: thomas renegar

Displaying records 31 to 37.
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31. Accurate Dimensional Metrology With Atomic Force Microscopy
Published: 6/1/2000
Authors: Ronald G Dixson, R Koning, Joseph Fu, Theodore Vincent Vorburger, Thomas B Renegar
Abstract: Atomic force microscopes (AFMs) generate three dimensional images with nanometer level resolution and, consequently, are used in the semiconductor industry as tools for sub-micrometer dimensional metrology. Measurements commonly performed with AFMs a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820959

32. A Simplified Realization for the Gaussian Filter in Surface Metrology
Published: 1/1/2000
Authors: Y B Yuan, Theodore Vincent Vorburger, Jun-Feng Song, Thomas B Renegar
Abstract: A simplified realization for the Gaussian filter in surface metrology is presented in this paper. The sampling function sinu/u is used for simplifying the Gaussian function. According to the central limit theorem, when n approaches infinity, the f ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820991

33. Experimental Test of Blind Tip Reconstruction for Scanning Probe Microscopy
Published: 1/1/2000
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip geometry is a prerequisite to converting the scanning probe microscope (SPM) from a simple imaging instrument to a tool that can perform width measurements accurately. Recently we developed blind reconstruction, a method to c ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820960

34. Step Height Metrology for Data Storage Applications
Published: 11/1/1999
Authors: R Koning, Ronald G Dixson, Joseph Fu, Thomas B Renegar, Theodore Vincent Vorburger, V W. Tsai, Michael T Postek
Abstract: The measurements of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) are quite different from the measurement of step heights on step height calibration standards.  Both the bumps and the pits show much large ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823118

35. Step-height Metrology for Data Storage Applications
Published: 11/1/1999
Authors: R Koning, Ronald G Dixson, Joseph Fu, Thomas B Renegar, Theodore Vincent Vorburger, V W. Tsai, Michael T Postek
Abstract: The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820931

36. Tip Characterization for Scanned Probe Microscope Width Metrology
Published: 3/1/1998
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823092

37. Stylus-Laser Surface Calibration System
Published: 10/1/1996
Authors: Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric Paul Whitenton, M Croarkin
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820830



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