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Author: heather patrick
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21. The Limits of Image-Based Optical Metrology
Richard M Silver, Bryan M Barnes, Ravikiran Attota, Jay Shi Jun, James J Filliben, Juan Soto, Michael T. Stocker, P Lipscomb, Egon Marx, Heather J Patrick, Ronald G Dixson, Robert D. Larrabee
An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this paper. We have developed a set of techniques we refer to as scatterfield microscopy ...
22. Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie
Heather J Patrick, R Attota, Thomas Avery Germer, M Stocker, R M Silver