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Author: heather patrick

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21. The Limits of Image-Based Optical Metrology
Published: 3/1/2006
Authors: Richard M Silver, Bryan M Barnes, Ravikiran (Ravikiran) Attota, Jay Shi Jun, James J Filliben, Juan Soto, Michael T. Stocker, P Lipscomb, Egon Marx, Heather J Patrick, Ronald G Dixson, Robert D. Larrabee
Abstract: An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this paper.  We have developed a set of techniques we refer to as scatterfield microscopy ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823206

22. Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie
Published: 1/1/2006
Authors: Heather J Patrick, R Attota, Thomas Avery Germer, M Stocker, R M Silver
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104709



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