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1. A Four-Zone Furnace for Realization of Silver and Gold Freezing Points
Published: 9/1/2003
Authors: Dean C Ripple, K Garrity, Christopher W Meyer
Abstract: Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell moun ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830843

2. A Revised Assessment of Calibration Uncertainties for Capsule Type Standard Platinum and Rhodium-Iron Resistance Thermometers
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6138
Published: 3/1/1998
Authors: Weston Leo Tew, Gregory F Strouse, Christopher W Meyer
Abstract: Calibration uncertainties for capsule type standard platinum and rhodium-iron resistance thermometers are reviewed and updated. Calibration procedures, thermometer characteristics, scale realization methods, and measurement techniques are described ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830585

3. Adjustments to the NIST Realization of the ITS-90 from 5 K to 24.5561 K
Published: 5/1/2008
Authors: Weston Leo Tew, Christopher W Meyer
Abstract: Recent clarifications issued by the Consultative Committee on Thermometry (CCT) for the definitions of the equilibrium hydrogen (e-H2) triple points (TPs) and vapor-pressure points (VPs) have resulted in adjustments to the NIST-disseminated ITS-90 (T ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=832258

4. Automated Continuous-Flow Gravimetric Hygrometer as a Primary Humidity Standard
Published: 5/1/2008
Authors: Christopher W Meyer, Joseph Terence Hodges, R W. Hyland, Gregory E Scace, J Valencia-Rodriguez, James R Whetstone
Abstract: A new primary gravimetric hygrometer has been completed at the National Institute of Standards and Technology (NIST). This apparatus determines the humidity in a steadily flowing gas stream by first separating the water from the carrier gas using de ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830962

5. CCT Key Comparison No 1 (CCT-K1): Realisations of the ITS-90, 0.65 K to 24.5561 K, Using Rhodium-Iron Resistance Thermometers
Published: 6/1/2004
Authors: R L Rusby, Christopher W Meyer, Weston Leo Tew, D I Head, K D Hill, O Tamura, P A. de Groot, B Fellmuth, A Storm, A Peruzzi, J Engert, D N Astrov, Y Dedikov, G A Kytin
Abstract: At its meeting in 1996 the CCT initiated five Key Comparisons to test the equivalence of realisations of the ITS-90 between National Measurement Institutes. CCT-K1 covers the temperature range from 0.65 K to 24.5561 K, in which the ITS-90 is defined ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830884

6. Calibration of Hygrometers with the Hybrid Humidity Generator
Series: Special Publication (NIST SP)
Published: 12/14/2008
Authors: Christopher W Meyer, Joseph Terence Hodges, Peter H Huang, W Wyatt Miller, Dean C Ripple, Gregory E Scace
Abstract: We describe here the calibration of customer hygrometers using a new humidity generator that has been commissioned at the National Institute of Standards and Technology. The NIST Hybrid Humidity Generator (HHG) generates frost/dew points from – ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=832432

7. Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
Published: 4/1/2000
Authors: Kenneth Gruber Kreider, D P DeWitt, Christopher W Meyer, Vincent P. Scheuerman
Abstract: We are developing an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RTP) that uses Pt/Pd wire and noble metal thin-film thermocouples that are welded to thin-film pads of Pt. The Pt/Pd wire the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831032

8. Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
Published: 10/1/2003
Authors: Kenneth Gruber Kreider, William Andrew Kimes, Christopher W Meyer, Dean C Ripple, Benjamin K Tsai, D H Chen, D P DeWitt
Abstract: Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830794

9. Chamber Radiation Effects on Calibration of Radiation Thermometers With a Thin-Film Thermocouple Test Wafer
Published: 6/1/1999
Authors: Benjamin K Tsai, D P DeWitt, Francis John Lovas, Kenneth Gruber Kreider, Christopher W Meyer, David W Allen
Abstract: In the semiconductor industry, Rapid Thermal Processing (RTP) utilizes a prescribed temperature-time recipe to silicon wafers undergoing processes such as annealing and oxide film formation. The National Technology Roadmap for Semiconductors (NTRS) ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841364

10. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas
Abstract: For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPR ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841488