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Author: egon marx
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1. A First Step Toward Photorealistic Rendering of Coated Surfaces and Computer-Based Standards of Appearance
Published: 1/1/2001
Authors: Fern Y Hunt, Egon Marx, G Meyer, Theodore Vincent Vorburger, P Walker, H Westlund
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821772

2. A First Step Towards Photorealistic Rendering of Coated Surfaces and Computer Based Standards of Appearance
Published: 1/1/2001
Authors: Fern Y Hunt, Egon Marx, G Meyer, Theodore Vincent Vorburger, P Walker, H Westlund
Abstract: We seek to explore the feasibility of producing computer graphic images to visualize the color and gloss of surfaces using optical and surface topographical data.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822453

3. A First Stop Towards Photorealistic Rendering of Coated Surfaces and Computer Based Standards of Appearance
Published: 11/1/1999
Authors: Fern Y Hunt, Egon Marx, G W Meyer, Theodore Vincent Vorburger, P A Walker, H B Westlund
Abstract: We seek to explore the feasibility of producing computer graphic images to visualize the color and gloss of surfaces using optical and surface topographical data.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=150784

4. Accuracy in Optical Image Modeling
Published: 2/26/2007
Authors: James Edward Potzick, Egon Marx, M P Davidson
Abstract: Wafer exposure process simulation and optical photomask feature metrology both rely on optical image modeling for accurate results. The best way to gauge the accuracy of an imaging model is to compare the model results with an actual image. Modeling ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822704

5. Angular Distribution of Light Scattered From a Sinusoidal Grating
Published: 1/1/2000
Authors: Egon Marx, Thomas Avery Germer, Theodore Vincent Vorburger, B C. Park
Abstract: The angular distributions of light scattered by gold-coated and aluminum-coated gratings having amplitudes of ~90 nm and periods of 6.67 ¿m were measured and calculated for light incident from a HeNe laser at an angle of 6E. Experimental results are ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820966

6. Beauty Baryons and Neutrinos as Dark Matter
Published: 1/1/2003
Author: Egon Marx
Abstract: Dark matter, according to a model of strong, weak, and electromagnetic interactions of elementary particles called the SWEEP model, is composed of beauty baryons and neutrions. In this model, all particles are composed of only three basic particle: t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822018

7. Calibration Strategies for Overlay and Registration Metrology
Published: 5/1/2003
Authors: Richard M Silver, Michael T. Stocker, Ravikiran Attota, M R Bishop, Jay Shi Jun, Egon Marx, M P Davidson, Robert D. Larrabee
Abstract: Critical dimensions in current and next generation devices are driving the need for tighter overlay registration tolerances and improved overlay metrology tool accuracy and repeatability. Tool matching, performance evaluation, model-based metrology, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821977

8. Comparison of Measured Optical Image Profiles of Silicon Lines with Two Different Theoretical Models
Published: 7/1/2002
Authors: Richard M Silver, Ravikiran Attota, Michael T. Stocker, Jay Shi Jun, Egon Marx, Robert D. Larrabee, B Russo, M P Davidson
Abstract: In this paper we describe a new method for the separation of too-induced measurement errors and sample-induced measurement errors. We apply the method to standard overlay target configurations. This method is used to separate the effects of the tool ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821754

9. Computation of Light Scattered Into Detector
Published: 1/1/2000
Author: Egon Marx
Abstract: To compare the measured bidirectional reflectance distribution function (BRDF) of a rough surface to the results of a computation, we have to take into account the aperture of the detector and, more generally, the properties of the measuring instrume ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820967

10. Computational Parameters in Simulation of Microscope Images
Published: 11/28/2008
Authors: Egon Marx, James Edward Potzick
Abstract: The simulation of microscope images computed from scattered fields determined using integral equations depend on a number of parameters that are not related to the scatterer or to the microscope but are choices made for the computation method. The ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900912



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