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You searched on: Author: zachary levine

Displaying records 81 to 90 of 113 records.
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81. Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence
Published: 12/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: We discuss the phenomena of intrinsic birefringence in cubic crystals that we first characterized experimentally and theoretically in ultraviolet optical materials. We analyze the wavelength dependence, the angular dependence, and symmetry of the ef ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840536

82. Intrinsic Birefringence in Calcium Fluoride and Barium Floride
Published: 12/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: We have measured an intrinsic birefringence in calcium fluoride in the ultraviolet for wavelengths from 365 nm down to 156 nm, and compared these results with theory and calculations. The measured effect is largest for propagation in the [110] direc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840507

83. Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography
Published: 12/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: lcium fluoride (CaF2) and other crystalline fluoride materials are beingexploited for latest-generation lithography optics, making up a significantcomponent of the optics of 193nm lithography systems and potentially theexclusive optical materials fo ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840558

84. X-Ray Tomography of Integrated Circuit Interconnects: Past and Future
Published: 11/1/2001
Author: Zachary H Levine
Abstract: An Al-W-silica integrated circuit interconnect sample was thinned to several micro {mu} and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Adva ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840114

85. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

86. Minizing Spatial-Dispersion-Induced Birefringence in Crystals Used for Precision Optics by Using Mixed Crystals of Materials With the Opposite Sign of the Birefringence
Published: 7/31/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: We recently measured and calculated an intrinsic birefringence in CaF^d2^ and BaF^d2^ cubic crystals in the ultraviolet (UV). These results present serious problems for use fo these crystalline materials for precision optics in the UV, e.g., for UV ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840516

87. Accurate Pattern Registration for Integrated Circuit Tomography
Published: 7/1/2001
Authors: Zachary H Levine, S Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Y Wang, Thomas B Lucatorto
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840063

88. AnEig: A Routine to Calculate the Eigenvalues and Eigenvectors of a Tensor Related to the Spatial Dispersion of Birefringence
Published: 6/1/2001
Author: Zachary H Levine
Abstract: A Fortran Subroutine and Mathematica function are given which calculate the eigenvalues and eigenvectors of a tensor which gives the anisotropy of the optical response in cubic crystals.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840111

89. Accurate pattern registration for integrated circuit tomography
Published: 1/1/2001
Authors: Zachary H Levine, Steven E Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Ying-ju Wang, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101603

90. Intrinsic Birefringence in Calcium Fluoride and Barium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101998



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