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Author: john kramar
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51. Measurement of Patterned Film Linewidth for Interconnect Characterization
L Linholm, Robert Allen, Michael W Cresswell, Rathindra Ghoshtagore, S Mayo, H Schafft, John A Kramar
The results from high-quality electrical and physical measurements on the same cross-bridge resistor test structure with approximately vertical sidewalls have shown differences in linewidth as great as 90 nm for selected conductive films. These diffe ...
52. Hertzian Contact Resonances
John A Kramar, T Mcwaid, J Schneir, E Clayton Teague
The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic moduli. Comparisons were made with predictions based on the Hertzian theory of elastic defor ...
53. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun
54. Electronic Limitations in Phase Meters for Heterodyne Interferometry
Nile M. Oldham, John A Kramar, P. S. Hetrick, E Clayton Teague
55. Electronic Limitations in Phase Meters for Heterodyne Interferometry
Nile M. Oldham, P. S. Hetrick, John A Kramar, William B. Penzes, T. Wheatley, E Clayton Teague