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Author: john kramar

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51. Measurement of Patterned Film Linewidth for Interconnect Characterization
Published: 1/1/1995
Authors: L Linholm, Robert Allen, Michael W Cresswell, Rathindra Ghoshtagore, S Mayo, H Schafft, John A Kramar
Abstract: The results from high-quality electrical and physical measurements on the same cross-bridge resistor test structure with approximately vertical sidewalls have shown differences in linewidth as great as 90 nm for selected conductive films. These diffe ...

52. Hertzian Contact Resonances
Published: 1/1/1994
Authors: John A Kramar, T Mcwaid, J Schneir, E Clayton Teague
Abstract: The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic moduli. Comparisons were made with predictions based on the Hertzian theory of elastic defor ...

53. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
Published: 12/31/1993
Authors: E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun

54. Electronic Limitations in Phase Meters for Heterodyne Interferometry
Published: 7/1/1993
Authors: Nile M. Oldham, John A Kramar, P. S. Hetrick, E Clayton Teague

55. Electronic Limitations in Phase Meters for Heterodyne Interferometry
Published: 10/1/1991
Authors: Nile M. Oldham, P. S. Hetrick, John A Kramar, William B. Penzes, T. Wheatley, E Clayton Teague

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