NIST logo

Publications Portal

You searched on:
Author: martin green

Displaying records 21 to 30.
Resort by: Date / Title


21. The Use of Apertures to Create Discrete Combinatorial Libraries Using Pulsed Laser Deposition
Published: 5/18/2007
Authors: Nabil Bassim, Peter K. Schenck, Eugene Donev, Edwin J Heilweil, Eric J Cockayne, Martin L Green, Leonard Feldman
Abstract: In Pulsed-Laser Deposition (PLD), there are many processing parameters that influence film properties which may be studied such as substrate-target distance, background reactive gas pressure, laser energy, substrate temperature and composition in mul ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851029

22. A High-Throughput Thermoelectric Power-Factor Screening Tool for Rapid Construction of Thermoelectric Property Diagrams
Published: 1/23/2007
Authors: Makoto Otani, Nathan Lowhorn, Peter K. Schenck, Winnie K Wong-Ng, Martin L Green, K Itaka, H Koinuma
Abstract: We have developed a high throughput screening tool that maps out thermoelectric power factors of combinatorial composition-spread film libraries. The screening tool allows us to measure the electrical conductivity and Seebeck coefficient of over 1000 ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851068

23. Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries
Published: 1/22/2007
Authors: Peter K. Schenck, Nabil Bassim, Makoto Otani, Hiroyuki Oguchi, Martin L Green
Abstract: The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851017

24. Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack
Published: 10/2/2006
Authors: K S Chang, Martin L Green, John S Suehle, Eckhard Vogel, Hao Xiong, Jason Hattrick-Simpers, Ichiro Takeuchi, O Famodu, K Ohmori, P Ahmet, T Chikyow, Prashant Majhi, B -H Lee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854309

25. Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO^d2^ for the Advanced Gate Stack
Published: 10/2/2006
Authors: Kao-Shuo Chang, Martin L Green, John S Suehle, Eric M. Vogel, Hao Xiong, Jason Hattrick-Simpers, Ichiro Takeuchi, O Famodu, K Ohnaka, T Chikyow, Prashant Majhi, B H Lee, M Gardner
Abstract: We have fabricated combinatorial Ni-Ti-Pt ternary metal gate thin film libraries on HfO2 using magnetron co-sputtering, to investigate flat-band voltage shift (DVfb) and leakage current density (JL) variations. Wavelength dispersive spectroscopy (WDS ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=850953

26. A Combinatorial Study of Metal Gate/HfO2 MOSCAPS
Published: 9/1/2006
Authors: Martin L Green, K S Chang, Ichiro Takeuchi, T Chikyow
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854327

27. The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation
Published: 1/16/2006
Authors: Martin L Green, Andrew John Allen, Xiang Li, Junling Wang, J Ilavsky, A Delabie, R Puurunen, B Brijs
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854304

28. Strain Relaxation in Patterned Strained Silicon Directly on Insulator Structures
Published: 12/19/2005
Authors: R Z Lei, W Tsai, I Aberg, T B O'Reilly, J L Hoyt, D A Antoniadis, H I Smith, Albert J. Paul, Martin L Green, J Li, R Hull
Abstract: Strain relaxation is studied in Strained Silicon Directly on Insulator (SSDOI) substrates patterned with nano-scale features. Using interference lithography, biaxially-strained SSDOI substrates with 30 nm-thick strained Si on insulator films were pa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=850913

29. A Combinatorial Study of Metal Gate/HfO2-MOSCAPS
Published: Date unknown
Authors: Martin L Green, Kao-Shuo Chang, Ichiro Takeuchi, T Chikyow
Abstract: Combinatorial methodology is a rapid technique for surveying new gate dielectrics and gate metal electrodes for the very complex advanced CMOS gate stack. Here, we report on a typical metal gate electrode alloy system, the Ni-Ti-Pt ternary. We have ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=850984

30. Rapid Detection of Thin-Film Interfacial Reactions by MEMS-DSC
Published: Date unknown
Authors: Lawrence P. Cook, Richard E Cavicchi, Yanbao Zhang, Mark D Vaudin, Christopher B Montgomery, William F. Egelhoff Jr., Martin L Green, Leslie Allen
Abstract: A MEMS-based differential scanning calorimeter (DSC) has been used to characterize the Ni/Si interfacial reaction in thin films at ramp rates of 940 C/s and 3760 C/s. The DSC devices were fabricated using CMOS semiconductor processing technology, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851005



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series