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Author: thomas germer

Displaying records 21 to 30 of 159 records.
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21. A Spectroscopic Polarimeter For Detecting Chiral Signatures In Astrobiological Samples
Published: 9/11/2009
Authors: Baoliang Wang, William Sparks, Thomas Avery Germer, Andy Leadbetter
Abstract: We have developed a polarimeter for accurately measuring both the circular and linear polarization components of a light beam from 400 nm to 800 nm. This polarimeter is designed to work at low light levels that are typical in astronomical application ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903335

22. Developing an Uncertainty Analysis for Optical Scatterometry
Published: 8/3/2009
Authors: Thomas Avery Germer, Heather J Patrick, Richard M Silver, Benjamin Bunday
Abstract: This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method includes the propagation of the measurement noise as ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901617

23. Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope
Published: 7/15/2009
Authors: Ravikiran (Ravikiran) Attota, Richard M Silver, Thomas Avery Germer
Abstract: We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902707

24. Towards a Remote Sensing Capability for Life s Chiral Signature using Circular Polarization
Published: 5/12/2009
Authors: William Sparks, James H. Hough, Thomas Avery Germer, Feng Chen, Shiladitya DasSarma, Priya DasSarma, Frank Robb, Neill Reid, Nadine Manset, Ludmilla Kolokolova, F. D. Macchetto, William Martin, Ed Turner
Abstract: The unique macroscopic homochirality of biological material offers the prospect of being detectable remotely using circular polarization. To explore this concept, we present spectropolarimetry of primitive photosynthetic microbial organisms. The refl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842489

25. Effect of Line Width Roughness on Optical Scatterometry Measurements
Published: 4/6/2009
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line width roughness (LWR) has been identified as a potential source of uncertainty in scatterometry measurements, and characterizing its effect is required to improve the method s accuracy and to make measurements traceable. In this work, we extend ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901895

26. Circular Polarization in Scattered Light as a Possible Biomarker
Published: 3/2/2009
Authors: Thomas Avery Germer, William Sparks, James H. Hough, Ludmilla Kolokolova, Feng Chen, Shiladitya DasSarma, Priya DasSarma, Frank Robb, Nadine Manset, Neill Reid, F. D. Macchetto, William Martin
Abstract: Biological molecules exhibit homochirality and are optically active. Therefore, it is possible that the scattering of light by biological molecules might result in a macroscopic signature in the form of circular polarization. If this is the case, the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901371

27. In situ measurement of annealing-induced line shape decay in nanoimprinted polymers using scatterometry
Published: 3/2/2009
Authors: Heather J Patrick, Thomas Avery Germer, Yifu Ding, Hyun W. Ro, Lee J Richter, Christopher L Soles
Abstract: Thermal embossing nanoimprint lithography (NIL) is an area of continuing interest because it allows direct patterning of nanoscale structures into a wide variety of functional polymer materials. Measuring the shape evolution of nanoimprinted lines d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901568

28. Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers
Published: 12/9/2008
Authors: Heather J Patrick, Thomas Avery Germer, Yifu Ding, Hyun W. Ro, Lee J Richter, Christopher L Soles
Abstract: We use optical scatterometry to extract the time evolution of the profile of nanoimprinted lines in low and high molecular mass polymer gratings during reflow at the glass transition temperature. The data are obtained continuously during the anneal ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900878

29. Modeling the Effect of Finite Size Gratings on Scatterometry Measurements
Published: 9/1/2008
Authors: Elizabeth Kenyon, Michael W Cresswell, Heather J Patrick, Thomas Avery Germer
Abstract: The interpretation of scatterometry measurements generally assumes that the grating extends over an area large enough to intercept all the illumination provided by an incident beam. However, in practice, the gratings used in scatterometry are relati ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842444

30. Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry
Published: 6/9/2008
Authors: Heather J Patrick, Thomas Avery Germer, Michael W Cresswell, Bin Li, Huai Huang, Paul S. Ho
Abstract: The extraction of nanoscale dimensions and feature geometry of grating targets using signature-based optical techniques is an area of continued interest in semiconductor manufacturing. In the current work, we have performed angle-resolved scatterome ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842548



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