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Author: thomas germer

Displaying records 11 to 20 of 154 records.
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11. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372

12. Generalized ellipsometry of artificially designed line width roughness
Published: 12/10/2010
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner, Ronald G Dixson
Abstract: We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906239

13. Effective medium approximations for modeling optical reflectance from gratings with rough edges
Published: 5/1/2010
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line edge roughness (LER) has been identified as a potential source of uncertainty in optical scatterometry measurements. Characterizing the effect of LER on optical scatterometry signals is required to assess measurement uncertainty. However, rigor ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903990

14. Effect of Bandwidth and Numerical Aperture in Optical Scatterometry
Published: 3/1/2010
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905013

15. Polarized Optical Scattering Signatures from Biological Materials
Published: 1/11/2010
Authors: W. E. Martin, E. Hesse, J. H. Hough, William Sparks, C. S. Cockell, Z. Ulanowski, Thomas Avery Germer, B. Kaye
Abstract: The polarization of laser light backscattered from biological samples has been measured over the wavelength range 350 to 850nm. Incident circular, linearly polarized, and unpolarized light produces significant spectrally prominent scattered polari ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906031

16. A Spectroscopic Polarimeter For Detecting Chiral Signatures In Astrobiological Samples
Published: 9/11/2009
Authors: Baoliang Wang, William Sparks, Thomas Avery Germer, Andy Leadbetter
Abstract: We have developed a polarimeter for accurately measuring both the circular and linear polarization components of a light beam from 400 nm to 800 nm. This polarimeter is designed to work at low light levels that are typical in astronomical application ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903335

17. Developing an Uncertainty Analysis for Optical Scatterometry
Published: 8/3/2009
Authors: Thomas Avery Germer, Heather J Patrick, Richard M Silver, Benjamin Bunday
Abstract: This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method includes the propagation of the measurement noise as ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901617

18. Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope
Published: 7/15/2009
Authors: Ravikiran Attota, Richard M Silver, Thomas Avery Germer
Abstract: We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902707

19. Towards a Remote Sensing Capability for Life s Chiral Signature using Circular Polarization
Published: 5/12/2009
Authors: William Sparks, James H. Hough, Thomas Avery Germer, Feng Chen, Shiladitya DasSarma, Priya DasSarma, Frank Robb, Neill Reid, Nadine Manset, Ludmilla Kolokolova, F. D. Macchetto, William Martin, Ed Turner
Abstract: The unique macroscopic homochirality of biological material offers the prospect of being detectable remotely using circular polarization. To explore this concept, we present spectropolarimetry of primitive photosynthetic microbial organisms. The refl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842489

20. Effect of Line Width Roughness on Optical Scatterometry Measurements
Published: 4/6/2009
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line width roughness (LWR) has been identified as a potential source of uncertainty in scatterometry measurements, and characterizing its effect is required to improve the method s accuracy and to make measurements traceable. In this work, we extend ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901895