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Author: thomas germer

Displaying records 11 to 20 of 159 records.
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11. BRDF measurements of graphite used in high-temperature fixed point blackbody radiators: a multi-angle study at 405 nm and 658 nm
Published: 3/12/2012
Authors: Heather J Patrick, Leonard M Hanssen, Jinan Zeng, Thomas Avery Germer
Abstract: We have measured angle- and polarization-resolved, hemispherical bidirectional reflectance distribution function (BRDF) for two types of graphite used in the fabrication of high temperature fixed point (HTFP) blackbody cavities. Measurements were m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909520

12. Differential matrices for depolarizing media
Published: 3/1/2012
Author: Thomas Avery Germer
Abstract: The evolution of a Stokes vector through depolarizing media is considered. A general form for the differential matrix is derived that is appropriate in the presence of depolarization, and is parameterized in a manner that ensures that it yields, upon ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909647

13. A Traceable Scatterometry Measurement of a Silicon Line Grating
Published: 5/26/2011
Authors: Thomas Avery Germer, Heather J Patrick, Ronald G Dixson
Abstract: In this paper, we present a spectroscopic Mueller matrix ellipsometry measurement of a silicon line grating with nominal pitch of 600 nm and line width 100 nm. An uncertainty analysis is performed on the measurement results. The results are compare ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908506

14. Effects of Roughness on Scatterometry Signatures
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

15. Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards
Published: 4/20/2011
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We measure the Mueller matrix bidirectional reflectance distribution function (BRDF) of pressed and sintered powdered polytetrafluoroethylene (PTFE) reflectance standards for an incident angle of 75°. Rotationally averaged Mueller matrices from the m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909321

16. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372

17. Generalized ellipsometry of artificially designed line width roughness
Published: 12/10/2010
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner, Ronald G Dixson
Abstract: We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906239

18. Effective medium approximations for modeling optical reflectance from gratings with rough edges
Published: 5/1/2010
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line edge roughness (LER) has been identified as a potential source of uncertainty in optical scatterometry measurements. Characterizing the effect of LER on optical scatterometry signals is required to assess measurement uncertainty. However, rigor ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903990

19. Effect of Bandwidth and Numerical Aperture in Optical Scatterometry
Published: 3/1/2010
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905013

20. Polarized Optical Scattering Signatures from Biological Materials
Published: 1/11/2010
Authors: W. E. Martin, E. Hesse, J. H. Hough, William Sparks, C. S. Cockell, Z. Ulanowski, Thomas Avery Germer, B. Kaye
Abstract: The polarization of laser light backscattered from biological samples has been measured over the wavelength range 350 to 850nm. Incident circular, linearly polarized, and unpolarized light produces significant spectrally prominent scattered polari ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906031



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