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Author: joseph fu
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1. Distributed Force Probe Bending Model of CD-AFM Bias
Published: 4/1/2013
Authors: Vladimir A. Ukraintsev, Ndubuisi George Orji, Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Richard M Silver
Abstract: Critical Dimension AFM (CD-AFM) is a widely used reference metrology technique. To characterize modern semiconductor devices, small and flexible probes, often 15 nm to 20 nm in diameter, are used. Recent studies have reported uncontrolled and signif ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912266

2. On CD-AFM bias related to probe bending
Published: 4/9/2012
Authors: Vladimir A Ukraintsev, Ndubuisi George Orji, Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Richard M Silver
Abstract: Critical Dimension AFM (CD-AFM) is a widely used reference metrology. To characterize modern semiconductor devices, very small and flexible probes, often 15 nm to 20 nm in diameter, are now frequently used. Several recent publications have reported ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910903

3. Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)
Published: 8/9/2011
Authors: Kai Li, Pradeep Narayanan Namboodiri, Sumanth B. Chikkamaranahalli, Gheorghe Stan, Ravikiran Attota, Joseph Fu, Richard M Silver
Abstract: Micro scale features are fabricated on Si (100) surfaces using lithographic techniques and then thermally processed in an ultra high vacuum (UHV) environment. Samples are flash heated at 1200 °C and further annealed at 1050 °C for 18 hours. The surf ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907301

4. Multi-laboratory Comparison of Traceable Atomic Force Microscope Measurements of 70 nm Grating Pitch
Published: 3/8/2011
Authors: Ronald G Dixson, Donald Chernoff, Shihua Wang, Theodore Vincent Vorburger, Siew-Leng Tan, Ndubuisi George Orji, Joseph Fu
Abstract: The National Institute of Standards and Technology (NIST), Advanced Surface Microscopy (ASM), and the National Metrology Centre (NMC) of the Agency for Science, Technology, and Research (A*STAR) in Singapore have completed a three-way interlaboratory ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906777

5. Nano- and Atom-scale Length Metrology
Published: 10/1/2010
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Ndubuisi George Orji, Joseph Fu, Richard A Allen, Michael W Cresswell, Vincent A Hackley
Abstract: Measurements of length at the nano-scale have increasing importance in manufacturing, especially in the electronics and biomedical industries. The properties of linewidth and step height are critical to the function and specification of semiconducto ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906609

6. Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation
Published: 8/13/2010
Authors: Wei Chu, Joseph Fu, Theodore Vincent Vorburger
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903899

7. Interlaboratory Comparison of Traceable Atomic Force Microscope Pitch Measurements
Published: 6/14/2010
Authors: Ronald G Dixson, Donald Chernoff, Shihua Wang, Theodore Vincent Vorburger, Ndubuisi George Orji, Siew-Leng Tan, Joseph Fu
Abstract: The National Institute of Standards and Technology (NIST), Advanced Surface Microscopy (ASM), and the National Metrology Centre (NMC) of the Agency for Science, Technology, and Research (A*STAR) in Singapore have undertaken a three-way interlaborator ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905745

8. An Improved Digital Image Correlation Method Applied to Scanning Probe Microscope Images
Published: 10/1/2009
Authors: Wei Chu, Joseph Fu, Theodore Vincent Vorburger
Abstract: Digital image correlation (DIC) is a method for measuring the surface displacements and displacement gradients in materials under deformation. During the calculation, the traditional DIC method directly uses the intensity values of compared images an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903160

9. Correction of Hysteresis in SPM Image by a Moving Window Correlation Method
Published: 10/1/2009
Author: Joseph Fu
Abstract: Many scanning probe microscopes (SPMs), such as the scanning tunneling microscope (STM) and atomic force microscope (AFM), use piezoelectric actuators operating in open loop for generating the scans of the surfaces. However, nonlinearities mainly cau ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902571

10. Influence of room temperature control system on AFM imaging
Published: 10/1/2009
Authors: Joseph Fu, Wei Chu, Theodore Vincent Vorburger
Abstract: As technology progresses, the control of environment for experiments is also getting more sophisticated; such as the control of lab temperature and vibration. Temperature controlled within ± 0.25° C for a general purpose lab is common place. We illus ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901426



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