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You searched on: Author: david allen

Displaying records 41 to 49.
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41. RTP Calibration Wafer Using Thin-Film Thermocouples
Published: 4/1/1998
Authors: Kenneth Gruber Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
Abstract: Rapid thermal processing (RTP) is a key technology for the cluster tool, single wafer manufacturing approach that is used to produce integrated circuits at lower cost with reduced line widths and thermal budgets. However, various problems associate ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830603

42. Calibration Wafer for Temperature Measurement in RTP Tools
Published: 1/1/1998
Authors: K G Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104583

43. RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas
Published: 1/1/1998
Authors: K G Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104582

44. In-Chamber Thermometry Calibration using a Silicon Proof-Wafer
Published: 1/1/1997
Authors: Benjamin K Tsai, Francis John Lovas, D P DeWitt, K G Kreider, G W Burns, David W Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104794

45. A Comparison of ITS-90 and Detector-Based Scales Between NPL and NIST Using Metal-Carbon Eutectics
Published: Date unknown
Authors: Graham Machin, Charles E Gibson, D L Lowe, David W Allen, Howard W Yoon
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841844

46. Portable LED-Illuminated Radiance Source
Published: Date unknown
Authors: David W Allen, G Dezsi, Howard W Yoon
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841811

47. Temperature Determination of the Ag-and Au-Freezing Points Using a Detector-Based Radiation Thermometer
Published: Date unknown
Authors: Howard W Yoon, David W Allen, Charles E Gibson, Maritoni Abatayo Litorja, Robert D. Saunders, Steven W Brown, George P Eppeldauer, Keith R Lykke
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841855

48. Temperature Scales Using Radiation Thermometers Calibratied From Absolute Irradiance and Radiance Responsivity
Published: Date unknown
Authors: Howard W Yoon, David W Allen, Charles E Gibson, Robert D. Saunders, Bettye C Johnson, Steven W Brown, Keith R Lykke
Abstract: In the International Temperature Scale of 1990 (ITS-90), temperatures above the freezing temperature of silver are defined with radiation thermometers calibrated using spectral radiance ratios to one of the silver-, gold- or copper-freezing temperatu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841740

49. Thermodynamic-Temperature Determinations of the Ag and Au Freezing Temperatures Using a Detector-Based Radiation Thermometer
Published: Date unknown
Authors: Howard W Yoon, David W Allen, Charles E Gibson, Maritoni Abatayo Litorja, Robert D. Saunders, Steven W Brown, George P Eppeldauer, Keith R Lykke
Abstract: We describe the development of a radiation thermometer calibrated for spectral radiance responsivity using cryogenic, electrical-substitution radiometry to determine the thermodynamic temperatures of the Ag- and Au-freezing temperatures. The absolut ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840978



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