Focused beam spectroscopic ellipsometer

The Sensor Science Division has a focused beam spectroscopic Mueller matrix ellipsometer.  Its capabilities include

• Wavelengths from 245 nm to 1000 nm
• Spot size approximately 25 µm x 60 µm
• Fixed incident angle of approximately 65°
• Sample sizes up to 300 mm diameter, with scanning capability within a central 150 mm x 150 mm square
• Measures 11 elements of the Mueller matrix
• Full 360° rotation of the sample

This instrument is complemented with software for fitting data to thin film optical properties and thicknesses, as well as structure parameters describing one-dimensionally and two-dimensionally periodic gratings.