> Return to SRD 134, Index of Semiconductor Process Gases
|
NITROUS
OXIDE
|
M.W. [1]
44.0128
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N.B.P [2]
184.67 K
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T.P [2]
182.3 K
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|
N2O
|
Pc [3]
7.245 MPa
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Tc [3]
309.57 K
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Vc [3]
0.09718 m3/kmol
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Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
1%/0.1%
|
-
|
Gas densitites are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
-
|
†0.1%/*-
|
|
Reference
|
4
|
5
|
4
|
4
|
4
|
4
|
5
|
5/6
|
|
200
|
4.04
|
374.99
|
-311.9
|
678.0
|
-47794
|
475438
|
#10.9
|
†9.98
|
|
210
|
4.10
|
573.1
|
-280.7
|
603.9
|
-28691
|
317801
|
#14.6
|
†10.47
|
|
220
|
4.17
|
840.95
|
-254.0
|
542.4
|
-16447
|
214933
|
#15.1
|
†10.95
|
|
230
|
4.23
|
1192
|
-231.1
|
490.7
|
-8505
|
146401
|
#15.6
|
†11.43
|
|
240
|
4.30
|
1640.2
|
-211.2
|
446.9
|
-3318
|
99939
|
#16.2
|
†11.92
|
|
250
|
4.36
|
2200.2
|
-193.7
|
409.4
|
73
|
67976
|
#16.7
|
†12.40
|
|
260
|
4.42
|
2887.4
|
-178.3
|
377.0
|
2280
|
45721
|
#17.2
|
†12.88
|
|
270
|
4.48
|
3718.6
|
-164.6
|
348.8
|
3695
|
30079
|
#17.7
|
†13.36
|
|
280
|
4.54
|
4713.4
|
-152.4
|
324.0
|
4577
|
19007
|
#18.2
|
†13.84
|
|
290
|
4.59
|
5897.3
|
-141.4
|
302.2
|
5099
|
11136
|
#18.7
|
†14.32
|
|
300
|
4.65
|
-
|
-131.5
|
282.8
|
5377
|
5529
|
#18.6
|
†14.80
|
|
310
|
4.70
|
-
|
-122.5
|
265.5
|
5490
|
1543
|
#19.4
|
†15.28
|
|
320
|
4.76
|
-
|
-114.3
|
250.0
|
5491
|
-1275
|
#20.2
|
†15.76
|
|
330
|
4.81
|
-
|
-106.9
|
236.1
|
5420
|
-3246
|
#21.0
|
†16.24
|
|
340
|
4.86
|
-
|
-100.0
|
223.5
|
5302
|
-4599
|
#21.8
|
†16.71
|
|
350
|
4.91
|
-
|
-93.7
|
212.0
|
5155
|
-5499
|
#22.6
|
†17.19
|
|
360
|
4.95
|
-
|
-87.9
|
201.6
|
4991
|
-6068
|
#23.4
|
†17.67
|
|
370
|
5.00
|
-
|
-82.5
|
192.0
|
4820
|
-6392
|
#24.2
|
†18.14
|
|
380
|
5.04
|
-
|
-77.5
|
183.3
|
4647
|
-6538
|
#25.0
|
†18.58
|
|
390
|
5.09
|
-
|
-72.8
|
175.2
|
4477
|
-6554
|
#25.8
|
#19.02
|
|
400
|
5.13
|
-
|
-68.5
|
167.8
|
4312
|
-6476
|
#26.6
|
#19.45
|
|
410
|
5.17
|
-
|
-64.4
|
160.9
|
4154
|
-6330
|
#27.3
|
#19.88
|
|
420
|
5.21
|
-
|
-60.6
|
154.5
|
4003
|
-6137
|
#28.1
|
#20.30
|
|
430
|
5.25
|
-
|
-57.0
|
148.6
|
3861
|
-5913
|
#28.9
|
#20.72
|
|
440
|
5.29
|
-
|
-53.7
|
143.1
|
3728
|
-5667
|
#29.7
|
#21.14
|
|
450
|
5.33
|
-
|
-50.5
|
137.9
|
3604
|
-5410
|
#30.5
|
#21.55
|
|
460
|
5.37
|
-
|
-47.6
|
133.1
|
3488
|
-5147
|
#31.3
|
#21.96
|
|
470
|
5.41
|
-
|
-44.7
|
128.6
|
3380
|
-4882
|
#32.1
|
#22.36
|
|
480
|
5.44
|
-
|
-42.1
|
124.4
|
3280
|
-4620
|
-
|
-
|
|
490
|
5.48
|
-
|
-39.6
|
120.4
|
3187
|
-4362
|
-
|
-
|
|
500
|
5.51
|
-
|
-37.2
|
116.6
|
3102
|
-4112
|
-
|
-
|
|
550
|
5.68
|
-
|
-26.8
|
100.7
|
2764
|
-2987
|
-
|
-
|
|
600
|
5.82
|
-
|
-18.6
|
88.5
|
2545
|
-2091
|
-
|
-
|
|
650
|
5.96
|
-
|
-11.9
|
78.8
|
2406
|
-1397
|
-
|
-
|
|
700
|
6.08
|
-
|
-6.4
|
70.9
|
2323
|
-863
|
-
|
-
|
|
750
|
6.19
|
-
|
-1.7
|
64.5
|
2278
|
-452
|
-
|
-
|
|
800
|
6.29
|
-
|
2.3
|
59.0
|
2259
|
-134
|
-
|
-
|
|
850
|
6.38
|
-
|
5.7
|
54.4
|
2259
|
112
|
-
|
-
|
|
900
|
6.46
|
-
|
8.7
|
50.5
|
2271
|
304
|
-
|
-
|
|
950
|
6.54
|
-
|
11.3
|
47.0
|
2291
|
454
|
-
|
-
|
|
1000
|
6.61
|
-
|
13.7
|
44.0
|
2318
|
571
|
-
|
-
|
References:
- IUPAC; "Atomic Weights of the Elements 1999", J Phys Chem Ref Data (2001, 30, 701).
- Westrum, E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of Organic Compounds (John Wiley and Sons, New York, 1969).
- Mathews, J.F., Chem. Rev. (1972, 72, 71).
- Hurly, J.J., "Thermodynamic Properties of Nitrous Oxide and Nitric Oxide from Speed of Sound Measurements, Int. J. Thermophys. (2003, v24, 1611).
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
- Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured with a Greenspan Viscometer," Int. J. Thermophys. (2004, v25, 625).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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